6/9/2010	9:02:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/9/2010	9:02:17 AM	Recipe started at 9:02 AM
6/9/2010	9:02:17 AM	H2 valve closed
6/9/2010	9:02:17 AM	BCl3 valve closed
6/9/2010	9:02:17 AM	PH3 valve closed
6/9/2010	9:02:17 AM	SiCl4 pre valve closed
6/9/2010	9:02:17 AM	SiCl4 post valve closed
6/9/2010	9:02:17 AM	Main Vac valve closed
6/9/2010	9:02:17 AM	Bypass valve closed
6/9/2010	9:02:17 AM	Bubbler valve closed
6/9/2010	9:02:17 AM	Helium valve opened
6/9/2010	9:02:17 AM	Helium MFC set to  500.000000
6/9/2010	9:02:17 AM	H2 MFC set to  0.000000
6/9/2010	9:02:17 AM	BCl3 MFC set to  0.000000
6/9/2010	9:02:17 AM	PHl3 MFC set to  0.000000
6/9/2010	9:02:17 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:02:17 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:02:17 AM	Tube furnace set to 0
6/9/2010	9:03:38 AM	Helium valve closed
6/9/2010	9:03:38 AM	H2 valve closed
6/9/2010	9:03:38 AM	BCl3 valve closed
6/9/2010	9:03:38 AM	PH3 valve closed
6/9/2010	9:03:38 AM	SiCl4 pre valve closed
6/9/2010	9:03:38 AM	SiCl4 post valve closed
6/9/2010	9:03:38 AM	Main Vac valve closed
6/9/2010	9:03:38 AM	Bypass valve closed
6/9/2010	9:03:38 AM	Bubbler valve closed
6/9/2010	9:03:38 AM	Helium MFC set to  0.000000
6/9/2010	9:03:38 AM	H2 MFC set to  0.000000
6/9/2010	9:03:38 AM	BCl3 MFC set to  0.000000
6/9/2010	9:03:38 AM	PHl3 MFC set to  0.000000
6/9/2010	9:03:38 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:03:38 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:03:38 AM	Tube furnace set to 0
6/9/2010	9:03:39 AM	Run finished at 9:03 AM
6/9/2010	9:03:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/9/2010	9:18:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	9:18:48 AM	Recipe started at 9:18 AM
6/9/2010	9:18:48 AM	Helium valve closed
6/9/2010	9:18:48 AM	H2 valve closed
6/9/2010	9:18:48 AM	BCl3 valve closed
6/9/2010	9:18:48 AM	PH3 valve closed
6/9/2010	9:18:48 AM	SiCl4 pre valve closed
6/9/2010	9:18:48 AM	SiCl4 post valve closed
6/9/2010	9:18:48 AM	Main Vac valve closed
6/9/2010	9:18:48 AM	Bubbler valve closed
6/9/2010	9:18:48 AM	Bypass valve opened
6/9/2010	9:18:48 AM	Helium MFC set to  0.000000
6/9/2010	9:18:48 AM	H2 MFC set to  0.000000
6/9/2010	9:18:48 AM	BCl3 MFC set to  0.000000
6/9/2010	9:18:48 AM	PHl3 MFC set to  0.000000
6/9/2010	9:18:48 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:18:48 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:18:48 AM	Tube furnace set to 0
6/9/2010	9:19:36 AM	Helium valve closed
6/9/2010	9:19:36 AM	H2 valve closed
6/9/2010	9:19:36 AM	BCl3 valve closed
6/9/2010	9:19:36 AM	PH3 valve closed
6/9/2010	9:19:36 AM	SiCl4 pre valve closed
6/9/2010	9:19:36 AM	SiCl4 post valve closed
6/9/2010	9:19:36 AM	Bubbler valve closed
6/9/2010	9:19:36 AM	Main Vac valve opened
6/9/2010	9:19:36 AM	Bypass valve opened
6/9/2010	9:19:36 AM	Helium MFC set to  0.000000
6/9/2010	9:19:36 AM	H2 MFC set to  0.000000
6/9/2010	9:19:36 AM	BCl3 MFC set to  0.000000
6/9/2010	9:19:36 AM	PHl3 MFC set to  0.000000
6/9/2010	9:19:36 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:19:36 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:19:36 AM	Tube furnace set to 0
6/9/2010	9:19:36 AM	Run finished at 9:19 AM
6/9/2010	9:19:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	9:20:03 AM	Recipe started at 9:20 AM
6/9/2010	9:20:03 AM	H2 valve closed
6/9/2010	9:20:03 AM	BCl3 valve closed
6/9/2010	9:20:03 AM	PH3 valve closed
6/9/2010	9:20:03 AM	SiCl4 pre valve closed
6/9/2010	9:20:03 AM	SiCl4 post valve closed
6/9/2010	9:20:03 AM	Main Vac valve closed
6/9/2010	9:20:03 AM	Bypass valve closed
6/9/2010	9:20:03 AM	Bubbler valve closed
6/9/2010	9:20:03 AM	Helium valve opened
6/9/2010	9:20:03 AM	Helium MFC set to  500.000000
6/9/2010	9:20:03 AM	H2 MFC set to  0.000000
6/9/2010	9:20:03 AM	BCl3 MFC set to  0.000000
6/9/2010	9:20:03 AM	PHl3 MFC set to  0.000000
6/9/2010	9:20:03 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:20:03 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:20:03 AM	Tube furnace set to 80
6/9/2010	9:20:46 AM	Helium valve closed
6/9/2010	9:20:46 AM	H2 valve closed
6/9/2010	9:20:46 AM	BCl3 valve closed
6/9/2010	9:20:46 AM	PH3 valve closed
6/9/2010	9:20:46 AM	SiCl4 pre valve closed
6/9/2010	9:20:46 AM	SiCl4 post valve closed
6/9/2010	9:20:46 AM	Main Vac valve closed
6/9/2010	9:20:46 AM	Bypass valve closed
6/9/2010	9:20:46 AM	Bubbler valve closed
6/9/2010	9:20:46 AM	Helium MFC set to  0.000000
6/9/2010	9:20:46 AM	H2 MFC set to  0.000000
6/9/2010	9:20:46 AM	BCl3 MFC set to  0.000000
6/9/2010	9:20:46 AM	PHl3 MFC set to  0.000000
6/9/2010	9:20:46 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:20:46 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:20:46 AM	Tube furnace set to 80
6/9/2010	9:21:01 AM	Helium valve closed
6/9/2010	9:21:01 AM	H2 valve closed
6/9/2010	9:21:01 AM	BCl3 valve closed
6/9/2010	9:21:01 AM	PH3 valve closed
6/9/2010	9:21:01 AM	SiCl4 pre valve closed
6/9/2010	9:21:01 AM	SiCl4 post valve closed
6/9/2010	9:21:01 AM	Main Vac valve closed
6/9/2010	9:21:01 AM	Bubbler valve closed
6/9/2010	9:21:01 AM	Bypass valve opened
6/9/2010	9:21:01 AM	Helium MFC set to  0.000000
6/9/2010	9:21:01 AM	H2 MFC set to  0.000000
6/9/2010	9:21:01 AM	BCl3 MFC set to  0.000000
6/9/2010	9:21:01 AM	PHl3 MFC set to  0.000000
6/9/2010	9:21:01 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:21:01 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:21:01 AM	Tube furnace set to 80
6/9/2010	9:21:30 AM	Helium valve closed
6/9/2010	9:21:30 AM	H2 valve closed
6/9/2010	9:21:30 AM	BCl3 valve closed
6/9/2010	9:21:30 AM	PH3 valve closed
6/9/2010	9:21:30 AM	SiCl4 pre valve closed
6/9/2010	9:21:30 AM	SiCl4 post valve closed
6/9/2010	9:21:30 AM	Bubbler valve closed
6/9/2010	9:21:30 AM	Main Vac valve opened
6/9/2010	9:21:30 AM	Bypass valve opened
6/9/2010	9:21:30 AM	Helium MFC set to  0.000000
6/9/2010	9:21:30 AM	H2 MFC set to  0.000000
6/9/2010	9:21:30 AM	BCl3 MFC set to  0.000000
6/9/2010	9:21:30 AM	PHl3 MFC set to  0.000000
6/9/2010	9:21:30 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:21:30 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:21:30 AM	Tube furnace set to 80
6/9/2010	9:23:07 AM	Run aborted at 9:23 AM
6/9/2010	9:23:07 AM	Helium valve closed
6/9/2010	9:23:07 AM	H2 valve closed
6/9/2010	9:23:07 AM	BCl3 valve closed
6/9/2010	9:23:07 AM	PH3 valve closed
6/9/2010	9:23:07 AM	SiCl4 pre valve closed
6/9/2010	9:23:07 AM	SiCl4 post valve closed
6/9/2010	9:23:07 AM	Bypass valve closed
6/9/2010	9:23:07 AM	Main Vac valve closed
6/9/2010	9:23:07 AM	Bubbler valve closed
6/9/2010	9:23:07 AM	Helium MFC set to  0.000000
6/9/2010	9:23:07 AM	H2 MFC set to  0.000000
6/9/2010	9:23:07 AM	BCl3 MFC set to  0.000000
6/9/2010	9:23:07 AM	PHl3 MFC set to  0.000000
6/9/2010	9:23:07 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:23:07 AM	Tube furnace set to 0
6/9/2010	9:23:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	9:23:10 AM	Recipe started at 9:23 AM
6/9/2010	9:23:10 AM	Helium valve closed
6/9/2010	9:23:10 AM	H2 valve closed
6/9/2010	9:23:10 AM	BCl3 valve closed
6/9/2010	9:23:10 AM	PH3 valve closed
6/9/2010	9:23:10 AM	SiCl4 pre valve closed
6/9/2010	9:23:10 AM	SiCl4 post valve closed
6/9/2010	9:23:10 AM	Main Vac valve closed
6/9/2010	9:23:10 AM	Bubbler valve closed
6/9/2010	9:23:10 AM	Bypass valve opened
6/9/2010	9:23:10 AM	Helium MFC set to  0.000000
6/9/2010	9:23:10 AM	H2 MFC set to  0.000000
6/9/2010	9:23:10 AM	BCl3 MFC set to  0.000000
6/9/2010	9:23:10 AM	PHl3 MFC set to  0.000000
6/9/2010	9:23:10 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:23:10 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:23:10 AM	Tube furnace set to 0
6/9/2010	9:23:10 AM	Helium valve closed
6/9/2010	9:23:10 AM	H2 valve closed
6/9/2010	9:23:10 AM	BCl3 valve closed
6/9/2010	9:23:10 AM	PH3 valve closed
6/9/2010	9:23:10 AM	SiCl4 pre valve closed
6/9/2010	9:23:10 AM	SiCl4 post valve closed
6/9/2010	9:23:10 AM	Bubbler valve closed
6/9/2010	9:23:10 AM	Main Vac valve opened
6/9/2010	9:23:10 AM	Bypass valve opened
6/9/2010	9:23:10 AM	Helium MFC set to  0.000000
6/9/2010	9:23:10 AM	H2 MFC set to  0.000000
6/9/2010	9:23:10 AM	BCl3 MFC set to  0.000000
6/9/2010	9:23:10 AM	PHl3 MFC set to  0.000000
6/9/2010	9:23:10 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:23:10 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:23:10 AM	Tube furnace set to 0
6/9/2010	9:23:11 AM	Run finished at 9:23 AM
6/9/2010	9:23:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	9:24:26 AM	Recipe started at 9:24 AM
6/9/2010	9:24:26 AM	H2 valve closed
6/9/2010	9:24:26 AM	BCl3 valve closed
6/9/2010	9:24:26 AM	PH3 valve closed
6/9/2010	9:24:26 AM	SiCl4 pre valve closed
6/9/2010	9:24:26 AM	SiCl4 post valve closed
6/9/2010	9:24:26 AM	Main Vac valve closed
6/9/2010	9:24:26 AM	Bypass valve closed
6/9/2010	9:24:26 AM	Bubbler valve closed
6/9/2010	9:24:26 AM	Helium valve opened
6/9/2010	9:24:26 AM	Helium MFC set to  500.000000
6/9/2010	9:24:26 AM	H2 MFC set to  0.000000
6/9/2010	9:24:26 AM	BCl3 MFC set to  0.000000
6/9/2010	9:24:26 AM	PHl3 MFC set to  0.000000
6/9/2010	9:24:26 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:24:26 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:24:27 AM	Tube furnace set to 80
6/9/2010	9:25:09 AM	Helium valve closed
6/9/2010	9:25:09 AM	H2 valve closed
6/9/2010	9:25:09 AM	BCl3 valve closed
6/9/2010	9:25:09 AM	PH3 valve closed
6/9/2010	9:25:09 AM	SiCl4 pre valve closed
6/9/2010	9:25:09 AM	SiCl4 post valve closed
6/9/2010	9:25:09 AM	Main Vac valve closed
6/9/2010	9:25:09 AM	Bypass valve closed
6/9/2010	9:25:09 AM	Bubbler valve closed
6/9/2010	9:25:09 AM	Helium MFC set to  0.000000
6/9/2010	9:25:09 AM	H2 MFC set to  0.000000
6/9/2010	9:25:09 AM	BCl3 MFC set to  0.000000
6/9/2010	9:25:09 AM	PHl3 MFC set to  0.000000
6/9/2010	9:25:09 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:25:09 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:25:09 AM	Tube furnace set to 80
6/9/2010	9:25:24 AM	Helium valve closed
6/9/2010	9:25:24 AM	H2 valve closed
6/9/2010	9:25:24 AM	BCl3 valve closed
6/9/2010	9:25:24 AM	PH3 valve closed
6/9/2010	9:25:24 AM	SiCl4 pre valve closed
6/9/2010	9:25:24 AM	SiCl4 post valve closed
6/9/2010	9:25:24 AM	Main Vac valve closed
6/9/2010	9:25:24 AM	Bubbler valve closed
6/9/2010	9:25:24 AM	Bypass valve opened
6/9/2010	9:25:24 AM	Helium MFC set to  0.000000
6/9/2010	9:25:24 AM	H2 MFC set to  0.000000
6/9/2010	9:25:24 AM	BCl3 MFC set to  0.000000
6/9/2010	9:25:24 AM	PHl3 MFC set to  0.000000
6/9/2010	9:25:24 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:25:24 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:25:24 AM	Tube furnace set to 80
6/9/2010	9:25:52 AM	Helium valve closed
6/9/2010	9:25:52 AM	H2 valve closed
6/9/2010	9:25:52 AM	BCl3 valve closed
6/9/2010	9:25:52 AM	PH3 valve closed
6/9/2010	9:25:52 AM	SiCl4 pre valve closed
6/9/2010	9:25:52 AM	SiCl4 post valve closed
6/9/2010	9:25:52 AM	Bubbler valve closed
6/9/2010	9:25:52 AM	Main Vac valve opened
6/9/2010	9:25:52 AM	Bypass valve opened
6/9/2010	9:25:52 AM	Helium MFC set to  0.000000
6/9/2010	9:25:52 AM	H2 MFC set to  0.000000
6/9/2010	9:25:52 AM	BCl3 MFC set to  0.000000
6/9/2010	9:25:52 AM	PHl3 MFC set to  0.000000
6/9/2010	9:25:52 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:25:52 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:25:52 AM	Tube furnace set to 80
6/9/2010	9:28:52 AM	H2 valve closed
6/9/2010	9:28:52 AM	BCl3 valve closed
6/9/2010	9:28:52 AM	PH3 valve closed
6/9/2010	9:28:52 AM	SiCl4 pre valve closed
6/9/2010	9:28:52 AM	SiCl4 post valve closed
6/9/2010	9:28:52 AM	Main Vac valve closed
6/9/2010	9:28:52 AM	Bypass valve closed
6/9/2010	9:28:52 AM	Bubbler valve closed
6/9/2010	9:28:52 AM	Helium valve opened
6/9/2010	9:28:52 AM	Helium MFC set to  500.000000
6/9/2010	9:28:52 AM	H2 MFC set to  0.000000
6/9/2010	9:28:52 AM	BCl3 MFC set to  0.000000
6/9/2010	9:28:52 AM	PHl3 MFC set to  0.000000
6/9/2010	9:28:52 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:28:52 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:28:52 AM	Tube furnace set to 80
6/9/2010	9:29:34 AM	Helium valve closed
6/9/2010	9:29:34 AM	H2 valve closed
6/9/2010	9:29:34 AM	BCl3 valve closed
6/9/2010	9:29:34 AM	PH3 valve closed
6/9/2010	9:29:34 AM	SiCl4 pre valve closed
6/9/2010	9:29:34 AM	SiCl4 post valve closed
6/9/2010	9:29:34 AM	Main Vac valve closed
6/9/2010	9:29:34 AM	Bypass valve closed
6/9/2010	9:29:34 AM	Bubbler valve closed
6/9/2010	9:29:34 AM	Helium MFC set to  0.000000
6/9/2010	9:29:34 AM	H2 MFC set to  0.000000
6/9/2010	9:29:34 AM	BCl3 MFC set to  0.000000
6/9/2010	9:29:34 AM	PHl3 MFC set to  0.000000
6/9/2010	9:29:34 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:29:34 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:29:34 AM	Tube furnace set to 80
6/9/2010	9:29:50 AM	Helium valve closed
6/9/2010	9:29:50 AM	H2 valve closed
6/9/2010	9:29:50 AM	BCl3 valve closed
6/9/2010	9:29:50 AM	PH3 valve closed
6/9/2010	9:29:50 AM	SiCl4 pre valve closed
6/9/2010	9:29:50 AM	SiCl4 post valve closed
6/9/2010	9:29:50 AM	Main Vac valve closed
6/9/2010	9:29:50 AM	Bubbler valve closed
6/9/2010	9:29:50 AM	Bypass valve opened
6/9/2010	9:29:50 AM	Helium MFC set to  0.000000
6/9/2010	9:29:50 AM	H2 MFC set to  0.000000
6/9/2010	9:29:50 AM	BCl3 MFC set to  0.000000
6/9/2010	9:29:50 AM	PHl3 MFC set to  0.000000
6/9/2010	9:29:50 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:29:50 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:29:50 AM	Tube furnace set to 80
6/9/2010	9:30:17 AM	Helium valve closed
6/9/2010	9:30:17 AM	H2 valve closed
6/9/2010	9:30:17 AM	BCl3 valve closed
6/9/2010	9:30:17 AM	PH3 valve closed
6/9/2010	9:30:17 AM	SiCl4 pre valve closed
6/9/2010	9:30:17 AM	SiCl4 post valve closed
6/9/2010	9:30:17 AM	Bubbler valve closed
6/9/2010	9:30:17 AM	Main Vac valve opened
6/9/2010	9:30:17 AM	Bypass valve opened
6/9/2010	9:30:17 AM	Helium MFC set to  0.000000
6/9/2010	9:30:17 AM	H2 MFC set to  0.000000
6/9/2010	9:30:17 AM	BCl3 MFC set to  0.000000
6/9/2010	9:30:17 AM	PHl3 MFC set to  0.000000
6/9/2010	9:30:17 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:30:17 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:30:17 AM	Tube furnace set to 80
6/9/2010	9:33:17 AM	H2 valve closed
6/9/2010	9:33:17 AM	BCl3 valve closed
6/9/2010	9:33:17 AM	PH3 valve closed
6/9/2010	9:33:17 AM	SiCl4 pre valve closed
6/9/2010	9:33:17 AM	SiCl4 post valve closed
6/9/2010	9:33:17 AM	Main Vac valve closed
6/9/2010	9:33:17 AM	Bypass valve closed
6/9/2010	9:33:17 AM	Bubbler valve closed
6/9/2010	9:33:17 AM	Helium valve opened
6/9/2010	9:33:17 AM	Helium MFC set to  500.000000
6/9/2010	9:33:17 AM	H2 MFC set to  0.000000
6/9/2010	9:33:17 AM	BCl3 MFC set to  0.000000
6/9/2010	9:33:17 AM	PHl3 MFC set to  0.000000
6/9/2010	9:33:17 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:33:17 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:33:18 AM	Tube furnace set to 80
6/9/2010	9:34:00 AM	Helium valve closed
6/9/2010	9:34:00 AM	H2 valve closed
6/9/2010	9:34:00 AM	BCl3 valve closed
6/9/2010	9:34:00 AM	PH3 valve closed
6/9/2010	9:34:00 AM	SiCl4 pre valve closed
6/9/2010	9:34:00 AM	SiCl4 post valve closed
6/9/2010	9:34:00 AM	Main Vac valve closed
6/9/2010	9:34:00 AM	Bypass valve closed
6/9/2010	9:34:00 AM	Bubbler valve closed
6/9/2010	9:34:00 AM	Helium MFC set to  0.000000
6/9/2010	9:34:00 AM	H2 MFC set to  0.000000
6/9/2010	9:34:00 AM	BCl3 MFC set to  0.000000
6/9/2010	9:34:00 AM	PHl3 MFC set to  0.000000
6/9/2010	9:34:00 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:34:00 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:34:00 AM	Tube furnace set to 80
6/9/2010	9:34:15 AM	Helium valve closed
6/9/2010	9:34:15 AM	H2 valve closed
6/9/2010	9:34:15 AM	BCl3 valve closed
6/9/2010	9:34:15 AM	PH3 valve closed
6/9/2010	9:34:15 AM	SiCl4 pre valve closed
6/9/2010	9:34:15 AM	SiCl4 post valve closed
6/9/2010	9:34:15 AM	Main Vac valve closed
6/9/2010	9:34:15 AM	Bubbler valve closed
6/9/2010	9:34:15 AM	Bypass valve opened
6/9/2010	9:34:15 AM	Helium MFC set to  0.000000
6/9/2010	9:34:15 AM	H2 MFC set to  0.000000
6/9/2010	9:34:15 AM	BCl3 MFC set to  0.000000
6/9/2010	9:34:15 AM	PHl3 MFC set to  0.000000
6/9/2010	9:34:15 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:34:15 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:34:15 AM	Tube furnace set to 80
6/9/2010	9:34:43 AM	Helium valve closed
6/9/2010	9:34:43 AM	H2 valve closed
6/9/2010	9:34:43 AM	BCl3 valve closed
6/9/2010	9:34:43 AM	PH3 valve closed
6/9/2010	9:34:43 AM	SiCl4 pre valve closed
6/9/2010	9:34:43 AM	SiCl4 post valve closed
6/9/2010	9:34:43 AM	Bubbler valve closed
6/9/2010	9:34:43 AM	Main Vac valve opened
6/9/2010	9:34:43 AM	Bypass valve opened
6/9/2010	9:34:43 AM	Helium MFC set to  0.000000
6/9/2010	9:34:43 AM	H2 MFC set to  0.000000
6/9/2010	9:34:43 AM	BCl3 MFC set to  0.000000
6/9/2010	9:34:43 AM	PHl3 MFC set to  0.000000
6/9/2010	9:34:43 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:34:43 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:34:43 AM	Tube furnace set to 80
6/9/2010	9:37:43 AM	Helium valve closed
6/9/2010	9:37:43 AM	H2 valve closed
6/9/2010	9:37:43 AM	BCl3 valve closed
6/9/2010	9:37:43 AM	PH3 valve closed
6/9/2010	9:37:43 AM	SiCl4 pre valve closed
6/9/2010	9:37:43 AM	SiCl4 post valve closed
6/9/2010	9:37:43 AM	Bubbler valve closed
6/9/2010	9:37:43 AM	Main Vac valve opened
6/9/2010	9:37:43 AM	Bypass valve opened
6/9/2010	9:37:43 AM	Helium MFC set to  0.000000
6/9/2010	9:37:43 AM	H2 MFC set to  0.000000
6/9/2010	9:37:43 AM	BCl3 MFC set to  0.000000
6/9/2010	9:37:43 AM	PHl3 MFC set to  0.000000
6/9/2010	9:37:43 AM	SiCl4 MFC set to  0.000000
6/9/2010	9:37:43 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	9:37:43 AM	Tube furnace set to 0
6/9/2010	9:37:44 AM	Run finished at 9:37 AM
6/9/2010	10:07:36 AM	Recipe started at 10:07 AM
6/9/2010	10:07:36 AM	H2 valve closed
6/9/2010	10:07:36 AM	BCl3 valve closed
6/9/2010	10:07:36 AM	PH3 valve closed
6/9/2010	10:07:36 AM	SiCl4 pre valve closed
6/9/2010	10:07:36 AM	SiCl4 post valve closed
6/9/2010	10:07:36 AM	Main Vac valve closed
6/9/2010	10:07:36 AM	Bypass valve closed
6/9/2010	10:07:36 AM	Bubbler valve closed
6/9/2010	10:07:36 AM	Helium valve opened
6/9/2010	10:07:36 AM	Helium MFC set to  500.000000
6/9/2010	10:07:36 AM	H2 MFC set to  0.000000
6/9/2010	10:07:36 AM	BCl3 MFC set to  0.000000
6/9/2010	10:07:36 AM	PHl3 MFC set to  0.000000
6/9/2010	10:07:36 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:07:36 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:07:36 AM	Tube furnace set to 80
6/9/2010	10:08:19 AM	Helium valve closed
6/9/2010	10:08:19 AM	H2 valve closed
6/9/2010	10:08:19 AM	BCl3 valve closed
6/9/2010	10:08:19 AM	PH3 valve closed
6/9/2010	10:08:19 AM	SiCl4 pre valve closed
6/9/2010	10:08:19 AM	SiCl4 post valve closed
6/9/2010	10:08:19 AM	Main Vac valve closed
6/9/2010	10:08:19 AM	Bypass valve closed
6/9/2010	10:08:19 AM	Bubbler valve closed
6/9/2010	10:08:19 AM	Helium MFC set to  0.000000
6/9/2010	10:08:19 AM	H2 MFC set to  0.000000
6/9/2010	10:08:19 AM	BCl3 MFC set to  0.000000
6/9/2010	10:08:19 AM	PHl3 MFC set to  0.000000
6/9/2010	10:08:19 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:08:19 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:08:20 AM	Tube furnace set to 80
6/9/2010	10:08:35 AM	Helium valve closed
6/9/2010	10:08:35 AM	H2 valve closed
6/9/2010	10:08:35 AM	BCl3 valve closed
6/9/2010	10:08:35 AM	PH3 valve closed
6/9/2010	10:08:35 AM	SiCl4 pre valve closed
6/9/2010	10:08:35 AM	SiCl4 post valve closed
6/9/2010	10:08:35 AM	Main Vac valve closed
6/9/2010	10:08:35 AM	Bubbler valve closed
6/9/2010	10:08:35 AM	Bypass valve opened
6/9/2010	10:08:35 AM	Helium MFC set to  0.000000
6/9/2010	10:08:35 AM	H2 MFC set to  0.000000
6/9/2010	10:08:35 AM	BCl3 MFC set to  0.000000
6/9/2010	10:08:35 AM	PHl3 MFC set to  0.000000
6/9/2010	10:08:35 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:08:35 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:08:35 AM	Tube furnace set to 80
6/9/2010	10:09:03 AM	Helium valve closed
6/9/2010	10:09:03 AM	H2 valve closed
6/9/2010	10:09:03 AM	BCl3 valve closed
6/9/2010	10:09:03 AM	PH3 valve closed
6/9/2010	10:09:03 AM	SiCl4 pre valve closed
6/9/2010	10:09:03 AM	SiCl4 post valve closed
6/9/2010	10:09:03 AM	Bubbler valve closed
6/9/2010	10:09:03 AM	Main Vac valve opened
6/9/2010	10:09:03 AM	Bypass valve opened
6/9/2010	10:09:03 AM	Helium MFC set to  0.000000
6/9/2010	10:09:03 AM	H2 MFC set to  0.000000
6/9/2010	10:09:03 AM	BCl3 MFC set to  0.000000
6/9/2010	10:09:03 AM	PHl3 MFC set to  0.000000
6/9/2010	10:09:03 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:09:03 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:09:03 AM	Tube furnace set to 80
6/9/2010	10:12:03 AM	H2 valve closed
6/9/2010	10:12:03 AM	BCl3 valve closed
6/9/2010	10:12:03 AM	PH3 valve closed
6/9/2010	10:12:03 AM	SiCl4 pre valve closed
6/9/2010	10:12:03 AM	SiCl4 post valve closed
6/9/2010	10:12:03 AM	Main Vac valve closed
6/9/2010	10:12:03 AM	Bypass valve closed
6/9/2010	10:12:03 AM	Bubbler valve closed
6/9/2010	10:12:03 AM	Helium valve opened
6/9/2010	10:12:03 AM	Helium MFC set to  500.000000
6/9/2010	10:12:03 AM	H2 MFC set to  0.000000
6/9/2010	10:12:03 AM	BCl3 MFC set to  0.000000
6/9/2010	10:12:03 AM	PHl3 MFC set to  0.000000
6/9/2010	10:12:03 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:12:03 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:12:03 AM	Tube furnace set to 80
6/9/2010	10:12:46 AM	Helium valve closed
6/9/2010	10:12:46 AM	H2 valve closed
6/9/2010	10:12:46 AM	BCl3 valve closed
6/9/2010	10:12:46 AM	PH3 valve closed
6/9/2010	10:12:46 AM	SiCl4 pre valve closed
6/9/2010	10:12:46 AM	SiCl4 post valve closed
6/9/2010	10:12:46 AM	Main Vac valve closed
6/9/2010	10:12:46 AM	Bypass valve closed
6/9/2010	10:12:46 AM	Bubbler valve closed
6/9/2010	10:12:46 AM	Helium MFC set to  0.000000
6/9/2010	10:12:46 AM	H2 MFC set to  0.000000
6/9/2010	10:12:46 AM	BCl3 MFC set to  0.000000
6/9/2010	10:12:46 AM	PHl3 MFC set to  0.000000
6/9/2010	10:12:46 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:12:46 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:12:46 AM	Tube furnace set to 80
6/9/2010	10:13:01 AM	Helium valve closed
6/9/2010	10:13:01 AM	H2 valve closed
6/9/2010	10:13:01 AM	BCl3 valve closed
6/9/2010	10:13:01 AM	PH3 valve closed
6/9/2010	10:13:01 AM	SiCl4 pre valve closed
6/9/2010	10:13:01 AM	SiCl4 post valve closed
6/9/2010	10:13:01 AM	Main Vac valve closed
6/9/2010	10:13:01 AM	Bubbler valve closed
6/9/2010	10:13:01 AM	Bypass valve opened
6/9/2010	10:13:01 AM	Helium MFC set to  0.000000
6/9/2010	10:13:01 AM	H2 MFC set to  0.000000
6/9/2010	10:13:01 AM	BCl3 MFC set to  0.000000
6/9/2010	10:13:01 AM	PHl3 MFC set to  0.000000
6/9/2010	10:13:01 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:13:01 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:13:01 AM	Tube furnace set to 80
6/9/2010	10:13:29 AM	Helium valve closed
6/9/2010	10:13:29 AM	H2 valve closed
6/9/2010	10:13:29 AM	BCl3 valve closed
6/9/2010	10:13:29 AM	PH3 valve closed
6/9/2010	10:13:29 AM	SiCl4 pre valve closed
6/9/2010	10:13:29 AM	SiCl4 post valve closed
6/9/2010	10:13:29 AM	Bubbler valve closed
6/9/2010	10:13:29 AM	Main Vac valve opened
6/9/2010	10:13:29 AM	Bypass valve opened
6/9/2010	10:13:29 AM	Helium MFC set to  0.000000
6/9/2010	10:13:29 AM	H2 MFC set to  0.000000
6/9/2010	10:13:29 AM	BCl3 MFC set to  0.000000
6/9/2010	10:13:29 AM	PHl3 MFC set to  0.000000
6/9/2010	10:13:29 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:13:29 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:13:29 AM	Tube furnace set to 80
6/9/2010	10:16:29 AM	H2 valve closed
6/9/2010	10:16:29 AM	BCl3 valve closed
6/9/2010	10:16:29 AM	PH3 valve closed
6/9/2010	10:16:29 AM	SiCl4 pre valve closed
6/9/2010	10:16:29 AM	SiCl4 post valve closed
6/9/2010	10:16:29 AM	Main Vac valve closed
6/9/2010	10:16:29 AM	Bypass valve closed
6/9/2010	10:16:29 AM	Bubbler valve closed
6/9/2010	10:16:29 AM	Helium valve opened
6/9/2010	10:16:29 AM	Helium MFC set to  500.000000
6/9/2010	10:16:29 AM	H2 MFC set to  0.000000
6/9/2010	10:16:29 AM	BCl3 MFC set to  0.000000
6/9/2010	10:16:29 AM	PHl3 MFC set to  0.000000
6/9/2010	10:16:29 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:16:29 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:16:29 AM	Tube furnace set to 80
6/9/2010	10:17:11 AM	Helium valve closed
6/9/2010	10:17:11 AM	H2 valve closed
6/9/2010	10:17:11 AM	BCl3 valve closed
6/9/2010	10:17:11 AM	PH3 valve closed
6/9/2010	10:17:11 AM	SiCl4 pre valve closed
6/9/2010	10:17:11 AM	SiCl4 post valve closed
6/9/2010	10:17:11 AM	Main Vac valve closed
6/9/2010	10:17:11 AM	Bypass valve closed
6/9/2010	10:17:11 AM	Bubbler valve closed
6/9/2010	10:17:11 AM	Helium MFC set to  0.000000
6/9/2010	10:17:11 AM	H2 MFC set to  0.000000
6/9/2010	10:17:11 AM	BCl3 MFC set to  0.000000
6/9/2010	10:17:11 AM	PHl3 MFC set to  0.000000
6/9/2010	10:17:11 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:17:11 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:17:12 AM	Tube furnace set to 80
6/9/2010	10:17:27 AM	Helium valve closed
6/9/2010	10:17:27 AM	H2 valve closed
6/9/2010	10:17:27 AM	BCl3 valve closed
6/9/2010	10:17:27 AM	PH3 valve closed
6/9/2010	10:17:27 AM	SiCl4 pre valve closed
6/9/2010	10:17:27 AM	SiCl4 post valve closed
6/9/2010	10:17:27 AM	Main Vac valve closed
6/9/2010	10:17:27 AM	Bubbler valve closed
6/9/2010	10:17:27 AM	Bypass valve opened
6/9/2010	10:17:27 AM	Helium MFC set to  0.000000
6/9/2010	10:17:27 AM	H2 MFC set to  0.000000
6/9/2010	10:17:27 AM	BCl3 MFC set to  0.000000
6/9/2010	10:17:27 AM	PHl3 MFC set to  0.000000
6/9/2010	10:17:27 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:17:27 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:17:27 AM	Tube furnace set to 80
6/9/2010	10:17:54 AM	Helium valve closed
6/9/2010	10:17:54 AM	H2 valve closed
6/9/2010	10:17:54 AM	BCl3 valve closed
6/9/2010	10:17:54 AM	PH3 valve closed
6/9/2010	10:17:54 AM	SiCl4 pre valve closed
6/9/2010	10:17:54 AM	SiCl4 post valve closed
6/9/2010	10:17:54 AM	Bubbler valve closed
6/9/2010	10:17:54 AM	Main Vac valve opened
6/9/2010	10:17:54 AM	Bypass valve opened
6/9/2010	10:17:54 AM	Helium MFC set to  0.000000
6/9/2010	10:17:54 AM	H2 MFC set to  0.000000
6/9/2010	10:17:54 AM	BCl3 MFC set to  0.000000
6/9/2010	10:17:54 AM	PHl3 MFC set to  0.000000
6/9/2010	10:17:54 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:17:54 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:17:54 AM	Tube furnace set to 80
6/9/2010	10:20:54 AM	Helium valve closed
6/9/2010	10:20:54 AM	H2 valve closed
6/9/2010	10:20:54 AM	BCl3 valve closed
6/9/2010	10:20:54 AM	PH3 valve closed
6/9/2010	10:20:54 AM	SiCl4 pre valve closed
6/9/2010	10:20:54 AM	SiCl4 post valve closed
6/9/2010	10:20:54 AM	Bubbler valve closed
6/9/2010	10:20:54 AM	Main Vac valve opened
6/9/2010	10:20:54 AM	Bypass valve opened
6/9/2010	10:20:54 AM	Helium MFC set to  0.000000
6/9/2010	10:20:54 AM	H2 MFC set to  0.000000
6/9/2010	10:20:55 AM	BCl3 MFC set to  0.000000
6/9/2010	10:20:55 AM	PHl3 MFC set to  0.000000
6/9/2010	10:20:55 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:20:55 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:20:55 AM	Tube furnace set to 0
6/9/2010	10:20:56 AM	Run finished at 10:20 AM
6/9/2010	10:40:27 AM	Recipe started at 10:40 AM
6/9/2010	10:40:27 AM	H2 valve closed
6/9/2010	10:40:27 AM	BCl3 valve closed
6/9/2010	10:40:27 AM	PH3 valve closed
6/9/2010	10:40:27 AM	SiCl4 pre valve closed
6/9/2010	10:40:27 AM	SiCl4 post valve closed
6/9/2010	10:40:27 AM	Main Vac valve closed
6/9/2010	10:40:27 AM	Bypass valve closed
6/9/2010	10:40:27 AM	Bubbler valve closed
6/9/2010	10:40:27 AM	Helium valve opened
6/9/2010	10:40:28 AM	Helium MFC set to  500.000000
6/9/2010	10:40:28 AM	H2 MFC set to  0.000000
6/9/2010	10:40:28 AM	BCl3 MFC set to  0.000000
6/9/2010	10:40:28 AM	PHl3 MFC set to  0.000000
6/9/2010	10:40:28 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:40:28 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:40:28 AM	Tube furnace set to 80
6/9/2010	10:41:10 AM	Helium valve closed
6/9/2010	10:41:10 AM	H2 valve closed
6/9/2010	10:41:10 AM	BCl3 valve closed
6/9/2010	10:41:10 AM	PH3 valve closed
6/9/2010	10:41:10 AM	SiCl4 pre valve closed
6/9/2010	10:41:10 AM	SiCl4 post valve closed
6/9/2010	10:41:10 AM	Main Vac valve closed
6/9/2010	10:41:10 AM	Bypass valve closed
6/9/2010	10:41:10 AM	Bubbler valve closed
6/9/2010	10:41:10 AM	Helium MFC set to  0.000000
6/9/2010	10:41:10 AM	H2 MFC set to  0.000000
6/9/2010	10:41:10 AM	BCl3 MFC set to  0.000000
6/9/2010	10:41:10 AM	PHl3 MFC set to  0.000000
6/9/2010	10:41:10 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:41:10 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:41:11 AM	Tube furnace set to 80
6/9/2010	10:41:26 AM	Helium valve closed
6/9/2010	10:41:26 AM	H2 valve closed
6/9/2010	10:41:26 AM	BCl3 valve closed
6/9/2010	10:41:26 AM	PH3 valve closed
6/9/2010	10:41:26 AM	SiCl4 pre valve closed
6/9/2010	10:41:26 AM	SiCl4 post valve closed
6/9/2010	10:41:26 AM	Main Vac valve closed
6/9/2010	10:41:26 AM	Bubbler valve closed
6/9/2010	10:41:26 AM	Bypass valve opened
6/9/2010	10:41:26 AM	Helium MFC set to  0.000000
6/9/2010	10:41:26 AM	H2 MFC set to  0.000000
6/9/2010	10:41:26 AM	BCl3 MFC set to  0.000000
6/9/2010	10:41:26 AM	PHl3 MFC set to  0.000000
6/9/2010	10:41:26 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:41:26 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:41:26 AM	Tube furnace set to 80
6/9/2010	10:41:54 AM	Helium valve closed
6/9/2010	10:41:54 AM	H2 valve closed
6/9/2010	10:41:54 AM	BCl3 valve closed
6/9/2010	10:41:54 AM	PH3 valve closed
6/9/2010	10:41:54 AM	SiCl4 pre valve closed
6/9/2010	10:41:54 AM	SiCl4 post valve closed
6/9/2010	10:41:54 AM	Bubbler valve closed
6/9/2010	10:41:54 AM	Main Vac valve opened
6/9/2010	10:41:54 AM	Bypass valve opened
6/9/2010	10:41:54 AM	Helium MFC set to  0.000000
6/9/2010	10:41:54 AM	H2 MFC set to  0.000000
6/9/2010	10:41:54 AM	BCl3 MFC set to  0.000000
6/9/2010	10:41:54 AM	PHl3 MFC set to  0.000000
6/9/2010	10:41:54 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:41:54 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:41:54 AM	Tube furnace set to 80
6/9/2010	10:44:54 AM	H2 valve closed
6/9/2010	10:44:54 AM	BCl3 valve closed
6/9/2010	10:44:54 AM	PH3 valve closed
6/9/2010	10:44:54 AM	SiCl4 pre valve closed
6/9/2010	10:44:54 AM	SiCl4 post valve closed
6/9/2010	10:44:54 AM	Main Vac valve closed
6/9/2010	10:44:54 AM	Bypass valve closed
6/9/2010	10:44:54 AM	Bubbler valve closed
6/9/2010	10:44:54 AM	Helium valve opened
6/9/2010	10:44:54 AM	Helium MFC set to  500.000000
6/9/2010	10:44:54 AM	H2 MFC set to  0.000000
6/9/2010	10:44:54 AM	BCl3 MFC set to  0.000000
6/9/2010	10:44:54 AM	PHl3 MFC set to  0.000000
6/9/2010	10:44:54 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:44:54 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:44:54 AM	Tube furnace set to 80
6/9/2010	10:45:36 AM	Helium valve closed
6/9/2010	10:45:36 AM	H2 valve closed
6/9/2010	10:45:36 AM	BCl3 valve closed
6/9/2010	10:45:36 AM	PH3 valve closed
6/9/2010	10:45:36 AM	SiCl4 pre valve closed
6/9/2010	10:45:36 AM	SiCl4 post valve closed
6/9/2010	10:45:36 AM	Main Vac valve closed
6/9/2010	10:45:36 AM	Bypass valve closed
6/9/2010	10:45:36 AM	Bubbler valve closed
6/9/2010	10:45:36 AM	Helium MFC set to  0.000000
6/9/2010	10:45:36 AM	H2 MFC set to  0.000000
6/9/2010	10:45:36 AM	BCl3 MFC set to  0.000000
6/9/2010	10:45:36 AM	PHl3 MFC set to  0.000000
6/9/2010	10:45:36 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:45:36 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:45:37 AM	Tube furnace set to 80
6/9/2010	10:45:52 AM	Helium valve closed
6/9/2010	10:45:52 AM	H2 valve closed
6/9/2010	10:45:52 AM	BCl3 valve closed
6/9/2010	10:45:52 AM	PH3 valve closed
6/9/2010	10:45:52 AM	SiCl4 pre valve closed
6/9/2010	10:45:52 AM	SiCl4 post valve closed
6/9/2010	10:45:52 AM	Main Vac valve closed
6/9/2010	10:45:52 AM	Bubbler valve closed
6/9/2010	10:45:52 AM	Bypass valve opened
6/9/2010	10:45:52 AM	Helium MFC set to  0.000000
6/9/2010	10:45:52 AM	H2 MFC set to  0.000000
6/9/2010	10:45:52 AM	BCl3 MFC set to  0.000000
6/9/2010	10:45:52 AM	PHl3 MFC set to  0.000000
6/9/2010	10:45:52 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:45:52 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:45:52 AM	Tube furnace set to 80
6/9/2010	10:46:20 AM	Helium valve closed
6/9/2010	10:46:20 AM	H2 valve closed
6/9/2010	10:46:20 AM	BCl3 valve closed
6/9/2010	10:46:20 AM	PH3 valve closed
6/9/2010	10:46:20 AM	SiCl4 pre valve closed
6/9/2010	10:46:20 AM	SiCl4 post valve closed
6/9/2010	10:46:20 AM	Bubbler valve closed
6/9/2010	10:46:20 AM	Main Vac valve opened
6/9/2010	10:46:20 AM	Bypass valve opened
6/9/2010	10:46:20 AM	Helium MFC set to  0.000000
6/9/2010	10:46:20 AM	H2 MFC set to  0.000000
6/9/2010	10:46:20 AM	BCl3 MFC set to  0.000000
6/9/2010	10:46:20 AM	PHl3 MFC set to  0.000000
6/9/2010	10:46:20 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:46:20 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:46:20 AM	Tube furnace set to 80
6/9/2010	10:49:20 AM	H2 valve closed
6/9/2010	10:49:20 AM	BCl3 valve closed
6/9/2010	10:49:20 AM	PH3 valve closed
6/9/2010	10:49:20 AM	SiCl4 pre valve closed
6/9/2010	10:49:20 AM	SiCl4 post valve closed
6/9/2010	10:49:20 AM	Main Vac valve closed
6/9/2010	10:49:20 AM	Bypass valve closed
6/9/2010	10:49:20 AM	Bubbler valve closed
6/9/2010	10:49:20 AM	Helium valve opened
6/9/2010	10:49:20 AM	Helium MFC set to  500.000000
6/9/2010	10:49:20 AM	H2 MFC set to  0.000000
6/9/2010	10:49:20 AM	BCl3 MFC set to  0.000000
6/9/2010	10:49:20 AM	PHl3 MFC set to  0.000000
6/9/2010	10:49:20 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:49:20 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:49:20 AM	Tube furnace set to 80
6/9/2010	10:50:02 AM	Helium valve closed
6/9/2010	10:50:02 AM	H2 valve closed
6/9/2010	10:50:02 AM	BCl3 valve closed
6/9/2010	10:50:02 AM	PH3 valve closed
6/9/2010	10:50:02 AM	SiCl4 pre valve closed
6/9/2010	10:50:02 AM	SiCl4 post valve closed
6/9/2010	10:50:02 AM	Main Vac valve closed
6/9/2010	10:50:02 AM	Bypass valve closed
6/9/2010	10:50:02 AM	Bubbler valve closed
6/9/2010	10:50:02 AM	Helium MFC set to  0.000000
6/9/2010	10:50:02 AM	H2 MFC set to  0.000000
6/9/2010	10:50:02 AM	BCl3 MFC set to  0.000000
6/9/2010	10:50:02 AM	PHl3 MFC set to  0.000000
6/9/2010	10:50:02 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:50:02 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:50:02 AM	Tube furnace set to 80
6/9/2010	10:50:17 AM	Helium valve closed
6/9/2010	10:50:17 AM	H2 valve closed
6/9/2010	10:50:17 AM	BCl3 valve closed
6/9/2010	10:50:17 AM	PH3 valve closed
6/9/2010	10:50:17 AM	SiCl4 pre valve closed
6/9/2010	10:50:17 AM	SiCl4 post valve closed
6/9/2010	10:50:17 AM	Main Vac valve closed
6/9/2010	10:50:17 AM	Bubbler valve closed
6/9/2010	10:50:17 AM	Bypass valve opened
6/9/2010	10:50:17 AM	Helium MFC set to  0.000000
6/9/2010	10:50:17 AM	H2 MFC set to  0.000000
6/9/2010	10:50:17 AM	BCl3 MFC set to  0.000000
6/9/2010	10:50:17 AM	PHl3 MFC set to  0.000000
6/9/2010	10:50:17 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:50:17 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:50:18 AM	Tube furnace set to 80
6/9/2010	10:50:45 AM	Helium valve closed
6/9/2010	10:50:45 AM	H2 valve closed
6/9/2010	10:50:45 AM	BCl3 valve closed
6/9/2010	10:50:45 AM	PH3 valve closed
6/9/2010	10:50:45 AM	SiCl4 pre valve closed
6/9/2010	10:50:45 AM	SiCl4 post valve closed
6/9/2010	10:50:45 AM	Bubbler valve closed
6/9/2010	10:50:45 AM	Main Vac valve opened
6/9/2010	10:50:45 AM	Bypass valve opened
6/9/2010	10:50:45 AM	Helium MFC set to  0.000000
6/9/2010	10:50:45 AM	H2 MFC set to  0.000000
6/9/2010	10:50:45 AM	BCl3 MFC set to  0.000000
6/9/2010	10:50:45 AM	PHl3 MFC set to  0.000000
6/9/2010	10:50:45 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:50:45 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:50:45 AM	Tube furnace set to 80
6/9/2010	10:53:45 AM	Helium valve closed
6/9/2010	10:53:45 AM	H2 valve closed
6/9/2010	10:53:45 AM	BCl3 valve closed
6/9/2010	10:53:45 AM	PH3 valve closed
6/9/2010	10:53:45 AM	SiCl4 pre valve closed
6/9/2010	10:53:45 AM	SiCl4 post valve closed
6/9/2010	10:53:45 AM	Bubbler valve closed
6/9/2010	10:53:45 AM	Main Vac valve opened
6/9/2010	10:53:45 AM	Bypass valve opened
6/9/2010	10:53:45 AM	Helium MFC set to  0.000000
6/9/2010	10:53:45 AM	H2 MFC set to  0.000000
6/9/2010	10:53:45 AM	BCl3 MFC set to  0.000000
6/9/2010	10:53:45 AM	PHl3 MFC set to  0.000000
6/9/2010	10:53:45 AM	SiCl4 MFC set to  0.000000
6/9/2010	10:53:45 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	10:53:45 AM	Tube furnace set to 0
6/9/2010	10:53:46 AM	Run finished at 10:53 AM
6/9/2010	11:09:35 AM	Bypass valve closed
6/9/2010	11:09:36 AM	Main Vac valve closed
6/9/2010	11:09:56 AM	Main Vac valve opened
6/9/2010	11:09:57 AM	Bypass valve opened
6/9/2010	11:12:20 AM	Recipe started at 11:12 AM
6/9/2010	11:12:20 AM	Helium valve closed
6/9/2010	11:12:20 AM	BCl3 valve closed
6/9/2010	11:12:20 AM	PH3 valve closed
6/9/2010	11:12:20 AM	SiCl4 pre valve closed
6/9/2010	11:12:20 AM	SiCl4 post valve closed
6/9/2010	11:12:20 AM	Main Vac valve closed
6/9/2010	11:12:20 AM	Bypass valve closed
6/9/2010	11:12:20 AM	Bubbler valve closed
6/9/2010	11:12:20 AM	H2 valve opened
6/9/2010	11:12:20 AM	Helium MFC set to  0.000000
6/9/2010	11:12:20 AM	H2 MFC set to  500.000000
6/9/2010	11:12:20 AM	BCl3 MFC set to  0.000000
6/9/2010	11:12:20 AM	PHl3 MFC set to  0.000000
6/9/2010	11:12:20 AM	SiCl4 MFC set to  0.000000
6/9/2010	11:12:20 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	11:12:20 AM	Tube furnace set to 0
6/9/2010	11:13:41 AM	Helium valve closed
6/9/2010	11:13:41 AM	BCl3 valve closed
6/9/2010	11:13:41 AM	PH3 valve closed
6/9/2010	11:13:41 AM	SiCl4 pre valve closed
6/9/2010	11:13:41 AM	SiCl4 post valve closed
6/9/2010	11:13:41 AM	Main Vac valve closed
6/9/2010	11:13:41 AM	Bypass valve closed
6/9/2010	11:13:41 AM	H2 valve opened
6/9/2010	11:13:41 AM	Bubbler valve opened
6/9/2010	11:13:41 AM	Helium MFC set to  0.000000
6/9/2010	11:13:41 AM	H2 MFC set to  500.000000
6/9/2010	11:13:41 AM	BCl3 MFC set to  0.000000
6/9/2010	11:13:41 AM	PHl3 MFC set to  0.000000
6/9/2010	11:13:41 AM	SiCl4 MFC set to  0.000000
6/9/2010	11:13:41 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	11:13:42 AM	Tube furnace set to 1000
6/9/2010	11:33:42 AM	Helium valve closed
6/9/2010	11:33:42 AM	PH3 valve closed
6/9/2010	11:33:42 AM	Main Vac valve closed
6/9/2010	11:33:42 AM	Bypass valve closed
6/9/2010	11:33:42 AM	H2 valve opened
6/9/2010	11:33:42 AM	BCl3 valve opened
6/9/2010	11:33:42 AM	SiCl4 pre valve opened
6/9/2010	11:33:42 AM	SiCl4 post valve opened
6/9/2010	11:33:42 AM	Bubbler valve opened
6/9/2010	11:33:42 AM	Helium MFC set to  0.000000
6/9/2010	11:33:42 AM	H2 MFC set to  500.000000
6/9/2010	11:33:42 AM	BCl3 MFC set to  35.000000
6/9/2010	11:33:42 AM	PHl3 MFC set to  0.000000
6/9/2010	11:33:42 AM	SiCl4 MFC set to  50.000000
6/9/2010	11:33:42 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	11:33:42 AM	Tube furnace set to 1000
6/9/2010	11:43:42 AM	H2 valve closed
6/9/2010	11:43:42 AM	BCl3 valve closed
6/9/2010	11:43:42 AM	PH3 valve closed
6/9/2010	11:43:42 AM	SiCl4 pre valve closed
6/9/2010	11:43:42 AM	SiCl4 post valve closed
6/9/2010	11:43:42 AM	Main Vac valve closed
6/9/2010	11:43:42 AM	Bypass valve closed
6/9/2010	11:43:42 AM	Helium valve opened
6/9/2010	11:43:42 AM	Bubbler valve opened
6/9/2010	11:43:42 AM	Helium MFC set to  500.000000
6/9/2010	11:43:42 AM	H2 MFC set to  0.000000
6/9/2010	11:43:42 AM	BCl3 MFC set to  0.000000
6/9/2010	11:43:42 AM	PHl3 MFC set to  0.000000
6/9/2010	11:43:42 AM	SiCl4 MFC set to  0.000000
6/9/2010	11:43:42 AM	Bypass solenoid MFC set to  0.000000
6/9/2010	11:43:42 AM	Tube furnace set to 0
6/9/2010	12:03:42 PM	Helium valve closed
6/9/2010	12:03:42 PM	H2 valve closed
6/9/2010	12:03:42 PM	BCl3 valve closed
6/9/2010	12:03:42 PM	PH3 valve closed
6/9/2010	12:03:42 PM	SiCl4 pre valve closed
6/9/2010	12:03:42 PM	SiCl4 post valve closed
6/9/2010	12:03:42 PM	Main Vac valve closed
6/9/2010	12:03:42 PM	Bypass valve closed
6/9/2010	12:03:42 PM	Bubbler valve closed
6/9/2010	12:03:42 PM	Helium MFC set to  0.000000
6/9/2010	12:03:42 PM	H2 MFC set to  0.000000
6/9/2010	12:03:42 PM	BCl3 MFC set to  0.000000
6/9/2010	12:03:42 PM	PHl3 MFC set to  0.000000
6/9/2010	12:03:42 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:03:42 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:03:42 PM	Tube furnace set to 0
6/9/2010	12:03:42 PM	Run finished at 12:03 PM
6/9/2010	12:07:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	12:07:54 PM	Recipe started at 12:07 PM
6/9/2010	12:07:54 PM	Helium valve closed
6/9/2010	12:07:54 PM	H2 valve closed
6/9/2010	12:07:54 PM	BCl3 valve closed
6/9/2010	12:07:54 PM	PH3 valve closed
6/9/2010	12:07:54 PM	SiCl4 pre valve closed
6/9/2010	12:07:54 PM	SiCl4 post valve closed
6/9/2010	12:07:54 PM	Main Vac valve closed
6/9/2010	12:07:54 PM	Bubbler valve closed
6/9/2010	12:07:54 PM	Bypass valve opened
6/9/2010	12:07:54 PM	Helium MFC set to  0.000000
6/9/2010	12:07:54 PM	H2 MFC set to  0.000000
6/9/2010	12:07:54 PM	BCl3 MFC set to  0.000000
6/9/2010	12:07:54 PM	PHl3 MFC set to  0.000000
6/9/2010	12:07:54 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:07:54 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:07:54 PM	Tube furnace set to 0
6/9/2010	12:08:40 PM	Helium valve closed
6/9/2010	12:08:40 PM	H2 valve closed
6/9/2010	12:08:40 PM	BCl3 valve closed
6/9/2010	12:08:40 PM	PH3 valve closed
6/9/2010	12:08:40 PM	SiCl4 pre valve closed
6/9/2010	12:08:40 PM	SiCl4 post valve closed
6/9/2010	12:08:40 PM	Bubbler valve closed
6/9/2010	12:08:40 PM	Main Vac valve opened
6/9/2010	12:08:40 PM	Bypass valve opened
6/9/2010	12:08:40 PM	Helium MFC set to  0.000000
6/9/2010	12:08:40 PM	H2 MFC set to  0.000000
6/9/2010	12:08:40 PM	BCl3 MFC set to  0.000000
6/9/2010	12:08:40 PM	PHl3 MFC set to  0.000000
6/9/2010	12:08:40 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:08:40 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:08:40 PM	Tube furnace set to 0
6/9/2010	12:08:40 PM	Run finished at 12:08 PM
6/9/2010	12:08:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	12:09:50 PM	Recipe started at 12:09 PM
6/9/2010	12:09:50 PM	H2 valve closed
6/9/2010	12:09:50 PM	BCl3 valve closed
6/9/2010	12:09:50 PM	PH3 valve closed
6/9/2010	12:09:50 PM	SiCl4 pre valve closed
6/9/2010	12:09:50 PM	SiCl4 post valve closed
6/9/2010	12:09:50 PM	Main Vac valve closed
6/9/2010	12:09:50 PM	Bypass valve closed
6/9/2010	12:09:50 PM	Bubbler valve closed
6/9/2010	12:09:50 PM	Helium valve opened
6/9/2010	12:09:50 PM	Helium MFC set to  500.000000
6/9/2010	12:09:50 PM	H2 MFC set to  0.000000
6/9/2010	12:09:50 PM	BCl3 MFC set to  0.000000
6/9/2010	12:09:50 PM	PHl3 MFC set to  0.000000
6/9/2010	12:09:50 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:09:50 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:09:50 PM	Tube furnace set to 80
6/9/2010	12:10:31 PM	Helium valve closed
6/9/2010	12:10:31 PM	H2 valve closed
6/9/2010	12:10:31 PM	BCl3 valve closed
6/9/2010	12:10:31 PM	PH3 valve closed
6/9/2010	12:10:31 PM	SiCl4 pre valve closed
6/9/2010	12:10:31 PM	SiCl4 post valve closed
6/9/2010	12:10:31 PM	Main Vac valve closed
6/9/2010	12:10:31 PM	Bypass valve closed
6/9/2010	12:10:31 PM	Bubbler valve closed
6/9/2010	12:10:31 PM	Helium MFC set to  0.000000
6/9/2010	12:10:31 PM	H2 MFC set to  0.000000
6/9/2010	12:10:31 PM	BCl3 MFC set to  0.000000
6/9/2010	12:10:31 PM	PHl3 MFC set to  0.000000
6/9/2010	12:10:31 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:10:31 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:10:31 PM	Tube furnace set to 80
6/9/2010	12:10:46 PM	Helium valve closed
6/9/2010	12:10:46 PM	H2 valve closed
6/9/2010	12:10:46 PM	BCl3 valve closed
6/9/2010	12:10:46 PM	PH3 valve closed
6/9/2010	12:10:46 PM	SiCl4 pre valve closed
6/9/2010	12:10:46 PM	SiCl4 post valve closed
6/9/2010	12:10:46 PM	Main Vac valve closed
6/9/2010	12:10:46 PM	Bubbler valve closed
6/9/2010	12:10:46 PM	Bypass valve opened
6/9/2010	12:10:46 PM	Helium MFC set to  0.000000
6/9/2010	12:10:46 PM	H2 MFC set to  0.000000
6/9/2010	12:10:46 PM	BCl3 MFC set to  0.000000
6/9/2010	12:10:46 PM	PHl3 MFC set to  0.000000
6/9/2010	12:10:46 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:10:46 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:10:47 PM	Tube furnace set to 80
6/9/2010	12:11:14 PM	Helium valve closed
6/9/2010	12:11:14 PM	H2 valve closed
6/9/2010	12:11:14 PM	BCl3 valve closed
6/9/2010	12:11:14 PM	PH3 valve closed
6/9/2010	12:11:14 PM	SiCl4 pre valve closed
6/9/2010	12:11:14 PM	SiCl4 post valve closed
6/9/2010	12:11:14 PM	Bubbler valve closed
6/9/2010	12:11:14 PM	Main Vac valve opened
6/9/2010	12:11:14 PM	Bypass valve opened
6/9/2010	12:11:14 PM	Helium MFC set to  0.000000
6/9/2010	12:11:14 PM	H2 MFC set to  0.000000
6/9/2010	12:11:14 PM	BCl3 MFC set to  0.000000
6/9/2010	12:11:14 PM	PHl3 MFC set to  0.000000
6/9/2010	12:11:14 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:11:14 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:11:14 PM	Tube furnace set to 80
6/9/2010	12:14:14 PM	H2 valve closed
6/9/2010	12:14:14 PM	BCl3 valve closed
6/9/2010	12:14:14 PM	PH3 valve closed
6/9/2010	12:14:14 PM	SiCl4 pre valve closed
6/9/2010	12:14:14 PM	SiCl4 post valve closed
6/9/2010	12:14:14 PM	Main Vac valve closed
6/9/2010	12:14:14 PM	Bypass valve closed
6/9/2010	12:14:14 PM	Bubbler valve closed
6/9/2010	12:14:14 PM	Helium valve opened
6/9/2010	12:14:14 PM	Helium MFC set to  500.000000
6/9/2010	12:14:14 PM	H2 MFC set to  0.000000
6/9/2010	12:14:14 PM	BCl3 MFC set to  0.000000
6/9/2010	12:14:14 PM	PHl3 MFC set to  0.000000
6/9/2010	12:14:14 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:14:14 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:14:14 PM	Tube furnace set to 80
6/9/2010	12:14:55 PM	Helium valve closed
6/9/2010	12:14:55 PM	H2 valve closed
6/9/2010	12:14:55 PM	BCl3 valve closed
6/9/2010	12:14:55 PM	PH3 valve closed
6/9/2010	12:14:55 PM	SiCl4 pre valve closed
6/9/2010	12:14:55 PM	SiCl4 post valve closed
6/9/2010	12:14:55 PM	Main Vac valve closed
6/9/2010	12:14:55 PM	Bypass valve closed
6/9/2010	12:14:55 PM	Bubbler valve closed
6/9/2010	12:14:55 PM	Helium MFC set to  0.000000
6/9/2010	12:14:55 PM	H2 MFC set to  0.000000
6/9/2010	12:14:55 PM	BCl3 MFC set to  0.000000
6/9/2010	12:14:55 PM	PHl3 MFC set to  0.000000
6/9/2010	12:14:55 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:14:55 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:14:55 PM	Tube furnace set to 80
6/9/2010	12:15:10 PM	Helium valve closed
6/9/2010	12:15:10 PM	H2 valve closed
6/9/2010	12:15:10 PM	BCl3 valve closed
6/9/2010	12:15:10 PM	PH3 valve closed
6/9/2010	12:15:10 PM	SiCl4 pre valve closed
6/9/2010	12:15:10 PM	SiCl4 post valve closed
6/9/2010	12:15:10 PM	Main Vac valve closed
6/9/2010	12:15:10 PM	Bubbler valve closed
6/9/2010	12:15:10 PM	Bypass valve opened
6/9/2010	12:15:10 PM	Helium MFC set to  0.000000
6/9/2010	12:15:10 PM	H2 MFC set to  0.000000
6/9/2010	12:15:10 PM	BCl3 MFC set to  0.000000
6/9/2010	12:15:10 PM	PHl3 MFC set to  0.000000
6/9/2010	12:15:10 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:15:10 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:15:10 PM	Tube furnace set to 80
6/9/2010	12:15:37 PM	Helium valve closed
6/9/2010	12:15:37 PM	H2 valve closed
6/9/2010	12:15:37 PM	BCl3 valve closed
6/9/2010	12:15:37 PM	PH3 valve closed
6/9/2010	12:15:37 PM	SiCl4 pre valve closed
6/9/2010	12:15:37 PM	SiCl4 post valve closed
6/9/2010	12:15:37 PM	Bubbler valve closed
6/9/2010	12:15:37 PM	Main Vac valve opened
6/9/2010	12:15:37 PM	Bypass valve opened
6/9/2010	12:15:37 PM	Helium MFC set to  0.000000
6/9/2010	12:15:37 PM	H2 MFC set to  0.000000
6/9/2010	12:15:37 PM	BCl3 MFC set to  0.000000
6/9/2010	12:15:37 PM	PHl3 MFC set to  0.000000
6/9/2010	12:15:37 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:15:37 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:15:38 PM	Tube furnace set to 80
6/9/2010	12:18:38 PM	H2 valve closed
6/9/2010	12:18:38 PM	BCl3 valve closed
6/9/2010	12:18:38 PM	PH3 valve closed
6/9/2010	12:18:38 PM	SiCl4 pre valve closed
6/9/2010	12:18:38 PM	SiCl4 post valve closed
6/9/2010	12:18:38 PM	Main Vac valve closed
6/9/2010	12:18:38 PM	Bypass valve closed
6/9/2010	12:18:38 PM	Bubbler valve closed
6/9/2010	12:18:38 PM	Helium valve opened
6/9/2010	12:18:38 PM	Helium MFC set to  500.000000
6/9/2010	12:18:38 PM	H2 MFC set to  0.000000
6/9/2010	12:18:38 PM	BCl3 MFC set to  0.000000
6/9/2010	12:18:38 PM	PHl3 MFC set to  0.000000
6/9/2010	12:18:38 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:18:38 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:18:38 PM	Tube furnace set to 80
6/9/2010	12:19:19 PM	Helium valve closed
6/9/2010	12:19:19 PM	H2 valve closed
6/9/2010	12:19:19 PM	BCl3 valve closed
6/9/2010	12:19:19 PM	PH3 valve closed
6/9/2010	12:19:19 PM	SiCl4 pre valve closed
6/9/2010	12:19:19 PM	SiCl4 post valve closed
6/9/2010	12:19:19 PM	Main Vac valve closed
6/9/2010	12:19:19 PM	Bypass valve closed
6/9/2010	12:19:19 PM	Bubbler valve closed
6/9/2010	12:19:19 PM	Helium MFC set to  0.000000
6/9/2010	12:19:19 PM	H2 MFC set to  0.000000
6/9/2010	12:19:19 PM	BCl3 MFC set to  0.000000
6/9/2010	12:19:19 PM	PHl3 MFC set to  0.000000
6/9/2010	12:19:19 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:19:19 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:19:19 PM	Tube furnace set to 80
6/9/2010	12:19:34 PM	Helium valve closed
6/9/2010	12:19:34 PM	H2 valve closed
6/9/2010	12:19:34 PM	BCl3 valve closed
6/9/2010	12:19:34 PM	PH3 valve closed
6/9/2010	12:19:34 PM	SiCl4 pre valve closed
6/9/2010	12:19:34 PM	SiCl4 post valve closed
6/9/2010	12:19:34 PM	Main Vac valve closed
6/9/2010	12:19:34 PM	Bubbler valve closed
6/9/2010	12:19:34 PM	Bypass valve opened
6/9/2010	12:19:34 PM	Helium MFC set to  0.000000
6/9/2010	12:19:34 PM	H2 MFC set to  0.000000
6/9/2010	12:19:34 PM	BCl3 MFC set to  0.000000
6/9/2010	12:19:34 PM	PHl3 MFC set to  0.000000
6/9/2010	12:19:34 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:19:34 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:19:34 PM	Tube furnace set to 80
6/9/2010	12:20:01 PM	Helium valve closed
6/9/2010	12:20:01 PM	H2 valve closed
6/9/2010	12:20:01 PM	BCl3 valve closed
6/9/2010	12:20:01 PM	PH3 valve closed
6/9/2010	12:20:01 PM	SiCl4 pre valve closed
6/9/2010	12:20:01 PM	SiCl4 post valve closed
6/9/2010	12:20:01 PM	Bubbler valve closed
6/9/2010	12:20:01 PM	Main Vac valve opened
6/9/2010	12:20:01 PM	Bypass valve opened
6/9/2010	12:20:01 PM	Helium MFC set to  0.000000
6/9/2010	12:20:01 PM	H2 MFC set to  0.000000
6/9/2010	12:20:01 PM	BCl3 MFC set to  0.000000
6/9/2010	12:20:01 PM	PHl3 MFC set to  0.000000
6/9/2010	12:20:01 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:20:01 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:20:01 PM	Tube furnace set to 80
6/9/2010	12:23:01 PM	Helium valve closed
6/9/2010	12:23:01 PM	H2 valve closed
6/9/2010	12:23:01 PM	BCl3 valve closed
6/9/2010	12:23:01 PM	PH3 valve closed
6/9/2010	12:23:01 PM	SiCl4 pre valve closed
6/9/2010	12:23:01 PM	SiCl4 post valve closed
6/9/2010	12:23:01 PM	Bubbler valve closed
6/9/2010	12:23:01 PM	Main Vac valve opened
6/9/2010	12:23:01 PM	Bypass valve opened
6/9/2010	12:23:01 PM	Helium MFC set to  0.000000
6/9/2010	12:23:01 PM	H2 MFC set to  0.000000
6/9/2010	12:23:01 PM	BCl3 MFC set to  0.000000
6/9/2010	12:23:01 PM	PHl3 MFC set to  0.000000
6/9/2010	12:23:01 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:23:01 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:23:01 PM	Tube furnace set to 0
6/9/2010	12:23:02 PM	Run finished at 12:23 PM
6/9/2010	12:37:39 PM	Recipe started at 12:37 PM
6/9/2010	12:37:39 PM	H2 valve closed
6/9/2010	12:37:39 PM	BCl3 valve closed
6/9/2010	12:37:39 PM	PH3 valve closed
6/9/2010	12:37:39 PM	SiCl4 pre valve closed
6/9/2010	12:37:39 PM	SiCl4 post valve closed
6/9/2010	12:37:39 PM	Main Vac valve closed
6/9/2010	12:37:39 PM	Bypass valve closed
6/9/2010	12:37:39 PM	Bubbler valve closed
6/9/2010	12:37:39 PM	Helium valve opened
6/9/2010	12:37:39 PM	Helium MFC set to  500.000000
6/9/2010	12:37:39 PM	H2 MFC set to  0.000000
6/9/2010	12:37:39 PM	BCl3 MFC set to  0.000000
6/9/2010	12:37:39 PM	PHl3 MFC set to  0.000000
6/9/2010	12:37:39 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:37:39 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:37:39 PM	Tube furnace set to 80
6/9/2010	12:38:20 PM	Helium valve closed
6/9/2010	12:38:20 PM	H2 valve closed
6/9/2010	12:38:20 PM	BCl3 valve closed
6/9/2010	12:38:20 PM	PH3 valve closed
6/9/2010	12:38:20 PM	SiCl4 pre valve closed
6/9/2010	12:38:20 PM	SiCl4 post valve closed
6/9/2010	12:38:20 PM	Main Vac valve closed
6/9/2010	12:38:20 PM	Bypass valve closed
6/9/2010	12:38:20 PM	Bubbler valve closed
6/9/2010	12:38:20 PM	Helium MFC set to  0.000000
6/9/2010	12:38:20 PM	H2 MFC set to  0.000000
6/9/2010	12:38:20 PM	BCl3 MFC set to  0.000000
6/9/2010	12:38:20 PM	PHl3 MFC set to  0.000000
6/9/2010	12:38:20 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:38:20 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:38:20 PM	Tube furnace set to 80
6/9/2010	12:38:35 PM	Helium valve closed
6/9/2010	12:38:35 PM	H2 valve closed
6/9/2010	12:38:35 PM	BCl3 valve closed
6/9/2010	12:38:35 PM	PH3 valve closed
6/9/2010	12:38:35 PM	SiCl4 pre valve closed
6/9/2010	12:38:35 PM	SiCl4 post valve closed
6/9/2010	12:38:35 PM	Main Vac valve closed
6/9/2010	12:38:35 PM	Bubbler valve closed
6/9/2010	12:38:35 PM	Bypass valve opened
6/9/2010	12:38:35 PM	Helium MFC set to  0.000000
6/9/2010	12:38:35 PM	H2 MFC set to  0.000000
6/9/2010	12:38:35 PM	BCl3 MFC set to  0.000000
6/9/2010	12:38:35 PM	PHl3 MFC set to  0.000000
6/9/2010	12:38:35 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:38:35 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:38:35 PM	Tube furnace set to 80
6/9/2010	12:39:02 PM	Helium valve closed
6/9/2010	12:39:02 PM	H2 valve closed
6/9/2010	12:39:02 PM	BCl3 valve closed
6/9/2010	12:39:02 PM	PH3 valve closed
6/9/2010	12:39:02 PM	SiCl4 pre valve closed
6/9/2010	12:39:02 PM	SiCl4 post valve closed
6/9/2010	12:39:02 PM	Bubbler valve closed
6/9/2010	12:39:02 PM	Main Vac valve opened
6/9/2010	12:39:02 PM	Bypass valve opened
6/9/2010	12:39:02 PM	Helium MFC set to  0.000000
6/9/2010	12:39:02 PM	H2 MFC set to  0.000000
6/9/2010	12:39:02 PM	BCl3 MFC set to  0.000000
6/9/2010	12:39:02 PM	PHl3 MFC set to  0.000000
6/9/2010	12:39:02 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:39:02 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:39:02 PM	Tube furnace set to 80
6/9/2010	12:42:02 PM	H2 valve closed
6/9/2010	12:42:02 PM	BCl3 valve closed
6/9/2010	12:42:02 PM	PH3 valve closed
6/9/2010	12:42:02 PM	SiCl4 pre valve closed
6/9/2010	12:42:02 PM	SiCl4 post valve closed
6/9/2010	12:42:02 PM	Main Vac valve closed
6/9/2010	12:42:02 PM	Bypass valve closed
6/9/2010	12:42:02 PM	Bubbler valve closed
6/9/2010	12:42:02 PM	Helium valve opened
6/9/2010	12:42:02 PM	Helium MFC set to  500.000000
6/9/2010	12:42:02 PM	H2 MFC set to  0.000000
6/9/2010	12:42:02 PM	BCl3 MFC set to  0.000000
6/9/2010	12:42:02 PM	PHl3 MFC set to  0.000000
6/9/2010	12:42:02 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:42:02 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:42:02 PM	Tube furnace set to 80
6/9/2010	12:42:43 PM	Helium valve closed
6/9/2010	12:42:43 PM	H2 valve closed
6/9/2010	12:42:43 PM	BCl3 valve closed
6/9/2010	12:42:43 PM	PH3 valve closed
6/9/2010	12:42:43 PM	SiCl4 pre valve closed
6/9/2010	12:42:43 PM	SiCl4 post valve closed
6/9/2010	12:42:43 PM	Main Vac valve closed
6/9/2010	12:42:43 PM	Bypass valve closed
6/9/2010	12:42:43 PM	Bubbler valve closed
6/9/2010	12:42:43 PM	Helium MFC set to  0.000000
6/9/2010	12:42:43 PM	H2 MFC set to  0.000000
6/9/2010	12:42:43 PM	BCl3 MFC set to  0.000000
6/9/2010	12:42:43 PM	PHl3 MFC set to  0.000000
6/9/2010	12:42:43 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:42:43 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:42:43 PM	Tube furnace set to 80
6/9/2010	12:42:58 PM	Helium valve closed
6/9/2010	12:42:58 PM	H2 valve closed
6/9/2010	12:42:58 PM	BCl3 valve closed
6/9/2010	12:42:58 PM	PH3 valve closed
6/9/2010	12:42:58 PM	SiCl4 pre valve closed
6/9/2010	12:42:58 PM	SiCl4 post valve closed
6/9/2010	12:42:58 PM	Main Vac valve closed
6/9/2010	12:42:58 PM	Bubbler valve closed
6/9/2010	12:42:58 PM	Bypass valve opened
6/9/2010	12:42:58 PM	Helium MFC set to  0.000000
6/9/2010	12:42:58 PM	H2 MFC set to  0.000000
6/9/2010	12:42:58 PM	BCl3 MFC set to  0.000000
6/9/2010	12:42:58 PM	PHl3 MFC set to  0.000000
6/9/2010	12:42:58 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:42:58 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:42:59 PM	Tube furnace set to 80
6/9/2010	12:43:25 PM	Helium valve closed
6/9/2010	12:43:25 PM	H2 valve closed
6/9/2010	12:43:25 PM	BCl3 valve closed
6/9/2010	12:43:25 PM	PH3 valve closed
6/9/2010	12:43:25 PM	SiCl4 pre valve closed
6/9/2010	12:43:25 PM	SiCl4 post valve closed
6/9/2010	12:43:25 PM	Bubbler valve closed
6/9/2010	12:43:25 PM	Main Vac valve opened
6/9/2010	12:43:25 PM	Bypass valve opened
6/9/2010	12:43:25 PM	Helium MFC set to  0.000000
6/9/2010	12:43:25 PM	H2 MFC set to  0.000000
6/9/2010	12:43:25 PM	BCl3 MFC set to  0.000000
6/9/2010	12:43:25 PM	PHl3 MFC set to  0.000000
6/9/2010	12:43:25 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:43:25 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:43:25 PM	Tube furnace set to 80
6/9/2010	12:46:25 PM	H2 valve closed
6/9/2010	12:46:25 PM	BCl3 valve closed
6/9/2010	12:46:25 PM	PH3 valve closed
6/9/2010	12:46:25 PM	SiCl4 pre valve closed
6/9/2010	12:46:25 PM	SiCl4 post valve closed
6/9/2010	12:46:25 PM	Main Vac valve closed
6/9/2010	12:46:25 PM	Bypass valve closed
6/9/2010	12:46:25 PM	Bubbler valve closed
6/9/2010	12:46:26 PM	Helium valve opened
6/9/2010	12:46:26 PM	Helium MFC set to  500.000000
6/9/2010	12:46:26 PM	H2 MFC set to  0.000000
6/9/2010	12:46:26 PM	BCl3 MFC set to  0.000000
6/9/2010	12:46:26 PM	PHl3 MFC set to  0.000000
6/9/2010	12:46:26 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:46:26 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:46:26 PM	Tube furnace set to 80
6/9/2010	12:47:06 PM	Helium valve closed
6/9/2010	12:47:06 PM	H2 valve closed
6/9/2010	12:47:06 PM	BCl3 valve closed
6/9/2010	12:47:06 PM	PH3 valve closed
6/9/2010	12:47:06 PM	SiCl4 pre valve closed
6/9/2010	12:47:06 PM	SiCl4 post valve closed
6/9/2010	12:47:06 PM	Main Vac valve closed
6/9/2010	12:47:06 PM	Bypass valve closed
6/9/2010	12:47:06 PM	Bubbler valve closed
6/9/2010	12:47:06 PM	Helium MFC set to  0.000000
6/9/2010	12:47:06 PM	H2 MFC set to  0.000000
6/9/2010	12:47:06 PM	BCl3 MFC set to  0.000000
6/9/2010	12:47:06 PM	PHl3 MFC set to  0.000000
6/9/2010	12:47:06 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:47:06 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:47:07 PM	Tube furnace set to 80
6/9/2010	12:47:22 PM	Helium valve closed
6/9/2010	12:47:22 PM	H2 valve closed
6/9/2010	12:47:22 PM	BCl3 valve closed
6/9/2010	12:47:22 PM	PH3 valve closed
6/9/2010	12:47:22 PM	SiCl4 pre valve closed
6/9/2010	12:47:22 PM	SiCl4 post valve closed
6/9/2010	12:47:22 PM	Main Vac valve closed
6/9/2010	12:47:22 PM	Bubbler valve closed
6/9/2010	12:47:22 PM	Bypass valve opened
6/9/2010	12:47:22 PM	Helium MFC set to  0.000000
6/9/2010	12:47:22 PM	H2 MFC set to  0.000000
6/9/2010	12:47:22 PM	BCl3 MFC set to  0.000000
6/9/2010	12:47:22 PM	PHl3 MFC set to  0.000000
6/9/2010	12:47:22 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:47:22 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:47:22 PM	Tube furnace set to 80
6/9/2010	12:47:49 PM	Helium valve closed
6/9/2010	12:47:49 PM	H2 valve closed
6/9/2010	12:47:49 PM	BCl3 valve closed
6/9/2010	12:47:49 PM	PH3 valve closed
6/9/2010	12:47:49 PM	SiCl4 pre valve closed
6/9/2010	12:47:49 PM	SiCl4 post valve closed
6/9/2010	12:47:49 PM	Bubbler valve closed
6/9/2010	12:47:49 PM	Main Vac valve opened
6/9/2010	12:47:49 PM	Bypass valve opened
6/9/2010	12:47:49 PM	Helium MFC set to  0.000000
6/9/2010	12:47:49 PM	H2 MFC set to  0.000000
6/9/2010	12:47:49 PM	BCl3 MFC set to  0.000000
6/9/2010	12:47:49 PM	PHl3 MFC set to  0.000000
6/9/2010	12:47:49 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:47:49 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:47:49 PM	Tube furnace set to 80
6/9/2010	12:50:49 PM	Helium valve closed
6/9/2010	12:50:49 PM	H2 valve closed
6/9/2010	12:50:49 PM	BCl3 valve closed
6/9/2010	12:50:49 PM	PH3 valve closed
6/9/2010	12:50:49 PM	SiCl4 pre valve closed
6/9/2010	12:50:49 PM	SiCl4 post valve closed
6/9/2010	12:50:49 PM	Bubbler valve closed
6/9/2010	12:50:49 PM	Main Vac valve opened
6/9/2010	12:50:49 PM	Bypass valve opened
6/9/2010	12:50:49 PM	Helium MFC set to  0.000000
6/9/2010	12:50:49 PM	H2 MFC set to  0.000000
6/9/2010	12:50:49 PM	BCl3 MFC set to  0.000000
6/9/2010	12:50:49 PM	PHl3 MFC set to  0.000000
6/9/2010	12:50:49 PM	SiCl4 MFC set to  0.000000
6/9/2010	12:50:49 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	12:50:49 PM	Tube furnace set to 0
6/9/2010	12:50:50 PM	Run finished at 12:50 PM
6/9/2010	2:32:32 PM	Recipe started at 2:32 PM
6/9/2010	2:32:32 PM	Helium valve closed
6/9/2010	2:32:32 PM	BCl3 valve closed
6/9/2010	2:32:32 PM	PH3 valve closed
6/9/2010	2:32:32 PM	SiCl4 pre valve closed
6/9/2010	2:32:32 PM	SiCl4 post valve closed
6/9/2010	2:32:32 PM	Main Vac valve closed
6/9/2010	2:32:32 PM	Bypass valve closed
6/9/2010	2:32:32 PM	Bubbler valve closed
6/9/2010	2:32:32 PM	H2 valve opened
6/9/2010	2:32:32 PM	Helium MFC set to  0.000000
6/9/2010	2:32:32 PM	H2 MFC set to  500.000000
6/9/2010	2:32:32 PM	BCl3 MFC set to  0.000000
6/9/2010	2:32:32 PM	PHl3 MFC set to  0.000000
6/9/2010	2:32:32 PM	SiCl4 MFC set to  0.000000
6/9/2010	2:32:32 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	2:32:32 PM	Tube furnace set to 0
6/9/2010	2:33:53 PM	Helium valve closed
6/9/2010	2:33:53 PM	BCl3 valve closed
6/9/2010	2:33:53 PM	PH3 valve closed
6/9/2010	2:33:53 PM	SiCl4 pre valve closed
6/9/2010	2:33:53 PM	SiCl4 post valve closed
6/9/2010	2:33:53 PM	Main Vac valve closed
6/9/2010	2:33:53 PM	Bypass valve closed
6/9/2010	2:33:53 PM	H2 valve opened
6/9/2010	2:33:53 PM	Bubbler valve opened
6/9/2010	2:33:53 PM	Helium MFC set to  0.000000
6/9/2010	2:33:53 PM	H2 MFC set to  500.000000
6/9/2010	2:33:53 PM	BCl3 MFC set to  0.000000
6/9/2010	2:33:53 PM	PHl3 MFC set to  0.000000
6/9/2010	2:33:53 PM	SiCl4 MFC set to  0.000000
6/9/2010	2:33:53 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	2:33:53 PM	Tube furnace set to 1000
6/9/2010	2:53:53 PM	Helium valve closed
6/9/2010	2:53:53 PM	PH3 valve closed
6/9/2010	2:53:53 PM	Main Vac valve closed
6/9/2010	2:53:53 PM	Bypass valve closed
6/9/2010	2:53:53 PM	H2 valve opened
6/9/2010	2:53:53 PM	BCl3 valve opened
6/9/2010	2:53:53 PM	SiCl4 pre valve opened
6/9/2010	2:53:53 PM	SiCl4 post valve opened
6/9/2010	2:53:53 PM	Bubbler valve opened
6/9/2010	2:53:53 PM	Helium MFC set to  0.000000
6/9/2010	2:53:53 PM	H2 MFC set to  500.000000
6/9/2010	2:53:53 PM	BCl3 MFC set to  35.000000
6/9/2010	2:53:53 PM	PHl3 MFC set to  0.000000
6/9/2010	2:53:53 PM	SiCl4 MFC set to  50.000000
6/9/2010	2:53:53 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	2:53:53 PM	Tube furnace set to 1000
6/9/2010	3:03:53 PM	H2 valve closed
6/9/2010	3:03:53 PM	BCl3 valve closed
6/9/2010	3:03:53 PM	PH3 valve closed
6/9/2010	3:03:53 PM	SiCl4 pre valve closed
6/9/2010	3:03:53 PM	SiCl4 post valve closed
6/9/2010	3:03:53 PM	Main Vac valve closed
6/9/2010	3:03:53 PM	Bypass valve closed
6/9/2010	3:03:53 PM	Helium valve opened
6/9/2010	3:03:53 PM	Bubbler valve opened
6/9/2010	3:03:53 PM	Helium MFC set to  500.000000
6/9/2010	3:03:53 PM	H2 MFC set to  0.000000
6/9/2010	3:03:53 PM	BCl3 MFC set to  0.000000
6/9/2010	3:03:53 PM	PHl3 MFC set to  0.000000
6/9/2010	3:03:53 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:03:53 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:03:53 PM	Tube furnace set to 0
6/9/2010	3:23:53 PM	Helium valve closed
6/9/2010	3:23:53 PM	H2 valve closed
6/9/2010	3:23:53 PM	BCl3 valve closed
6/9/2010	3:23:53 PM	PH3 valve closed
6/9/2010	3:23:53 PM	SiCl4 pre valve closed
6/9/2010	3:23:53 PM	SiCl4 post valve closed
6/9/2010	3:23:53 PM	Main Vac valve closed
6/9/2010	3:23:53 PM	Bypass valve closed
6/9/2010	3:23:53 PM	Bubbler valve closed
6/9/2010	3:23:53 PM	Helium MFC set to  0.000000
6/9/2010	3:23:53 PM	H2 MFC set to  0.000000
6/9/2010	3:23:53 PM	BCl3 MFC set to  0.000000
6/9/2010	3:23:53 PM	PHl3 MFC set to  0.000000
6/9/2010	3:23:53 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:23:53 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:23:53 PM	Tube furnace set to 0
6/9/2010	3:23:54 PM	Run finished at 3:23 PM
6/9/2010	3:26:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	3:26:46 PM	Recipe started at 3:26 PM
6/9/2010	3:26:46 PM	Helium valve closed
6/9/2010	3:26:46 PM	H2 valve closed
6/9/2010	3:26:46 PM	BCl3 valve closed
6/9/2010	3:26:46 PM	PH3 valve closed
6/9/2010	3:26:46 PM	SiCl4 pre valve closed
6/9/2010	3:26:46 PM	SiCl4 post valve closed
6/9/2010	3:26:46 PM	Main Vac valve closed
6/9/2010	3:26:46 PM	Bubbler valve closed
6/9/2010	3:26:46 PM	Bypass valve opened
6/9/2010	3:26:46 PM	Helium MFC set to  0.000000
6/9/2010	3:26:46 PM	H2 MFC set to  0.000000
6/9/2010	3:26:46 PM	BCl3 MFC set to  0.000000
6/9/2010	3:26:46 PM	PHl3 MFC set to  0.000000
6/9/2010	3:26:46 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:26:46 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:26:47 PM	Tube furnace set to 0
6/9/2010	3:27:33 PM	Helium valve closed
6/9/2010	3:27:33 PM	H2 valve closed
6/9/2010	3:27:33 PM	BCl3 valve closed
6/9/2010	3:27:33 PM	PH3 valve closed
6/9/2010	3:27:33 PM	SiCl4 pre valve closed
6/9/2010	3:27:33 PM	SiCl4 post valve closed
6/9/2010	3:27:33 PM	Bubbler valve closed
6/9/2010	3:27:33 PM	Main Vac valve opened
6/9/2010	3:27:33 PM	Bypass valve opened
6/9/2010	3:27:33 PM	Helium MFC set to  0.000000
6/9/2010	3:27:33 PM	H2 MFC set to  0.000000
6/9/2010	3:27:33 PM	BCl3 MFC set to  0.000000
6/9/2010	3:27:33 PM	PHl3 MFC set to  0.000000
6/9/2010	3:27:33 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:27:33 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:27:33 PM	Tube furnace set to 0
6/9/2010	3:27:33 PM	Run finished at 3:27 PM
6/9/2010	3:27:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	3:28:31 PM	Recipe started at 3:28 PM
6/9/2010	3:28:31 PM	H2 valve closed
6/9/2010	3:28:31 PM	BCl3 valve closed
6/9/2010	3:28:31 PM	PH3 valve closed
6/9/2010	3:28:31 PM	SiCl4 pre valve closed
6/9/2010	3:28:31 PM	SiCl4 post valve closed
6/9/2010	3:28:31 PM	Main Vac valve closed
6/9/2010	3:28:31 PM	Bypass valve closed
6/9/2010	3:28:31 PM	Bubbler valve closed
6/9/2010	3:28:31 PM	Helium valve opened
6/9/2010	3:28:31 PM	Helium MFC set to  500.000000
6/9/2010	3:28:31 PM	H2 MFC set to  0.000000
6/9/2010	3:28:31 PM	BCl3 MFC set to  0.000000
6/9/2010	3:28:31 PM	PHl3 MFC set to  0.000000
6/9/2010	3:28:31 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:28:31 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:28:32 PM	Tube furnace set to 80
6/9/2010	3:29:14 PM	Helium valve closed
6/9/2010	3:29:14 PM	H2 valve closed
6/9/2010	3:29:14 PM	BCl3 valve closed
6/9/2010	3:29:14 PM	PH3 valve closed
6/9/2010	3:29:14 PM	SiCl4 pre valve closed
6/9/2010	3:29:14 PM	SiCl4 post valve closed
6/9/2010	3:29:14 PM	Main Vac valve closed
6/9/2010	3:29:14 PM	Bypass valve closed
6/9/2010	3:29:14 PM	Bubbler valve closed
6/9/2010	3:29:14 PM	Helium MFC set to  0.000000
6/9/2010	3:29:14 PM	H2 MFC set to  0.000000
6/9/2010	3:29:14 PM	BCl3 MFC set to  0.000000
6/9/2010	3:29:14 PM	PHl3 MFC set to  0.000000
6/9/2010	3:29:14 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:29:14 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:29:14 PM	Tube furnace set to 80
6/9/2010	3:29:29 PM	Helium valve closed
6/9/2010	3:29:29 PM	H2 valve closed
6/9/2010	3:29:29 PM	BCl3 valve closed
6/9/2010	3:29:29 PM	PH3 valve closed
6/9/2010	3:29:29 PM	SiCl4 pre valve closed
6/9/2010	3:29:29 PM	SiCl4 post valve closed
6/9/2010	3:29:29 PM	Main Vac valve closed
6/9/2010	3:29:29 PM	Bubbler valve closed
6/9/2010	3:29:29 PM	Bypass valve opened
6/9/2010	3:29:29 PM	Helium MFC set to  0.000000
6/9/2010	3:29:29 PM	H2 MFC set to  0.000000
6/9/2010	3:29:29 PM	BCl3 MFC set to  0.000000
6/9/2010	3:29:29 PM	PHl3 MFC set to  0.000000
6/9/2010	3:29:29 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:29:29 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:29:29 PM	Tube furnace set to 80
6/9/2010	3:29:57 PM	Helium valve closed
6/9/2010	3:29:57 PM	H2 valve closed
6/9/2010	3:29:57 PM	BCl3 valve closed
6/9/2010	3:29:57 PM	PH3 valve closed
6/9/2010	3:29:57 PM	SiCl4 pre valve closed
6/9/2010	3:29:57 PM	SiCl4 post valve closed
6/9/2010	3:29:57 PM	Bubbler valve closed
6/9/2010	3:29:57 PM	Main Vac valve opened
6/9/2010	3:29:57 PM	Bypass valve opened
6/9/2010	3:29:57 PM	Helium MFC set to  0.000000
6/9/2010	3:29:57 PM	H2 MFC set to  0.000000
6/9/2010	3:29:57 PM	BCl3 MFC set to  0.000000
6/9/2010	3:29:57 PM	PHl3 MFC set to  0.000000
6/9/2010	3:29:57 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:29:57 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:29:57 PM	Tube furnace set to 80
6/9/2010	3:32:57 PM	H2 valve closed
6/9/2010	3:32:57 PM	BCl3 valve closed
6/9/2010	3:32:57 PM	PH3 valve closed
6/9/2010	3:32:57 PM	SiCl4 pre valve closed
6/9/2010	3:32:57 PM	SiCl4 post valve closed
6/9/2010	3:32:57 PM	Main Vac valve closed
6/9/2010	3:32:57 PM	Bypass valve closed
6/9/2010	3:32:57 PM	Bubbler valve closed
6/9/2010	3:32:57 PM	Helium valve opened
6/9/2010	3:32:57 PM	Helium MFC set to  500.000000
6/9/2010	3:32:57 PM	H2 MFC set to  0.000000
6/9/2010	3:32:57 PM	BCl3 MFC set to  0.000000
6/9/2010	3:32:57 PM	PHl3 MFC set to  0.000000
6/9/2010	3:32:57 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:32:57 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:32:57 PM	Tube furnace set to 80
6/9/2010	3:33:40 PM	Helium valve closed
6/9/2010	3:33:40 PM	H2 valve closed
6/9/2010	3:33:40 PM	BCl3 valve closed
6/9/2010	3:33:40 PM	PH3 valve closed
6/9/2010	3:33:40 PM	SiCl4 pre valve closed
6/9/2010	3:33:40 PM	SiCl4 post valve closed
6/9/2010	3:33:40 PM	Main Vac valve closed
6/9/2010	3:33:40 PM	Bypass valve closed
6/9/2010	3:33:40 PM	Bubbler valve closed
6/9/2010	3:33:40 PM	Helium MFC set to  0.000000
6/9/2010	3:33:40 PM	H2 MFC set to  0.000000
6/9/2010	3:33:40 PM	BCl3 MFC set to  0.000000
6/9/2010	3:33:40 PM	PHl3 MFC set to  0.000000
6/9/2010	3:33:40 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:33:40 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:33:40 PM	Tube furnace set to 80
6/9/2010	3:33:55 PM	Helium valve closed
6/9/2010	3:33:55 PM	H2 valve closed
6/9/2010	3:33:55 PM	BCl3 valve closed
6/9/2010	3:33:55 PM	PH3 valve closed
6/9/2010	3:33:55 PM	SiCl4 pre valve closed
6/9/2010	3:33:55 PM	SiCl4 post valve closed
6/9/2010	3:33:55 PM	Main Vac valve closed
6/9/2010	3:33:55 PM	Bubbler valve closed
6/9/2010	3:33:55 PM	Bypass valve opened
6/9/2010	3:33:55 PM	Helium MFC set to  0.000000
6/9/2010	3:33:55 PM	H2 MFC set to  0.000000
6/9/2010	3:33:55 PM	BCl3 MFC set to  0.000000
6/9/2010	3:33:55 PM	PHl3 MFC set to  0.000000
6/9/2010	3:33:55 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:33:55 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:33:55 PM	Tube furnace set to 80
6/9/2010	3:34:23 PM	Helium valve closed
6/9/2010	3:34:23 PM	H2 valve closed
6/9/2010	3:34:23 PM	BCl3 valve closed
6/9/2010	3:34:23 PM	PH3 valve closed
6/9/2010	3:34:23 PM	SiCl4 pre valve closed
6/9/2010	3:34:23 PM	SiCl4 post valve closed
6/9/2010	3:34:23 PM	Bubbler valve closed
6/9/2010	3:34:23 PM	Main Vac valve opened
6/9/2010	3:34:23 PM	Bypass valve opened
6/9/2010	3:34:23 PM	Helium MFC set to  0.000000
6/9/2010	3:34:23 PM	H2 MFC set to  0.000000
6/9/2010	3:34:23 PM	BCl3 MFC set to  0.000000
6/9/2010	3:34:23 PM	PHl3 MFC set to  0.000000
6/9/2010	3:34:23 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:34:23 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:34:23 PM	Tube furnace set to 80
6/9/2010	3:37:23 PM	H2 valve closed
6/9/2010	3:37:23 PM	BCl3 valve closed
6/9/2010	3:37:23 PM	PH3 valve closed
6/9/2010	3:37:23 PM	SiCl4 pre valve closed
6/9/2010	3:37:23 PM	SiCl4 post valve closed
6/9/2010	3:37:23 PM	Main Vac valve closed
6/9/2010	3:37:23 PM	Bypass valve closed
6/9/2010	3:37:23 PM	Bubbler valve closed
6/9/2010	3:37:23 PM	Helium valve opened
6/9/2010	3:37:23 PM	Helium MFC set to  500.000000
6/9/2010	3:37:23 PM	H2 MFC set to  0.000000
6/9/2010	3:37:23 PM	BCl3 MFC set to  0.000000
6/9/2010	3:37:23 PM	PHl3 MFC set to  0.000000
6/9/2010	3:37:23 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:37:23 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:37:24 PM	Tube furnace set to 80
6/9/2010	3:38:06 PM	Helium valve closed
6/9/2010	3:38:06 PM	H2 valve closed
6/9/2010	3:38:06 PM	BCl3 valve closed
6/9/2010	3:38:06 PM	PH3 valve closed
6/9/2010	3:38:06 PM	SiCl4 pre valve closed
6/9/2010	3:38:06 PM	SiCl4 post valve closed
6/9/2010	3:38:06 PM	Main Vac valve closed
6/9/2010	3:38:06 PM	Bypass valve closed
6/9/2010	3:38:06 PM	Bubbler valve closed
6/9/2010	3:38:06 PM	Helium MFC set to  0.000000
6/9/2010	3:38:06 PM	H2 MFC set to  0.000000
6/9/2010	3:38:06 PM	BCl3 MFC set to  0.000000
6/9/2010	3:38:06 PM	PHl3 MFC set to  0.000000
6/9/2010	3:38:06 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:38:06 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:38:06 PM	Tube furnace set to 80
6/9/2010	3:38:21 PM	Helium valve closed
6/9/2010	3:38:21 PM	H2 valve closed
6/9/2010	3:38:21 PM	BCl3 valve closed
6/9/2010	3:38:21 PM	PH3 valve closed
6/9/2010	3:38:21 PM	SiCl4 pre valve closed
6/9/2010	3:38:21 PM	SiCl4 post valve closed
6/9/2010	3:38:21 PM	Main Vac valve closed
6/9/2010	3:38:21 PM	Bubbler valve closed
6/9/2010	3:38:21 PM	Bypass valve opened
6/9/2010	3:38:21 PM	Helium MFC set to  0.000000
6/9/2010	3:38:21 PM	H2 MFC set to  0.000000
6/9/2010	3:38:21 PM	BCl3 MFC set to  0.000000
6/9/2010	3:38:21 PM	PHl3 MFC set to  0.000000
6/9/2010	3:38:21 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:38:21 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:38:21 PM	Tube furnace set to 80
6/9/2010	3:38:49 PM	Helium valve closed
6/9/2010	3:38:49 PM	H2 valve closed
6/9/2010	3:38:49 PM	BCl3 valve closed
6/9/2010	3:38:49 PM	PH3 valve closed
6/9/2010	3:38:49 PM	SiCl4 pre valve closed
6/9/2010	3:38:49 PM	SiCl4 post valve closed
6/9/2010	3:38:49 PM	Bubbler valve closed
6/9/2010	3:38:49 PM	Main Vac valve opened
6/9/2010	3:38:49 PM	Bypass valve opened
6/9/2010	3:38:49 PM	Helium MFC set to  0.000000
6/9/2010	3:38:49 PM	H2 MFC set to  0.000000
6/9/2010	3:38:49 PM	BCl3 MFC set to  0.000000
6/9/2010	3:38:49 PM	PHl3 MFC set to  0.000000
6/9/2010	3:38:49 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:38:49 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:38:50 PM	Tube furnace set to 80
6/9/2010	3:41:50 PM	Helium valve closed
6/9/2010	3:41:50 PM	H2 valve closed
6/9/2010	3:41:50 PM	BCl3 valve closed
6/9/2010	3:41:50 PM	PH3 valve closed
6/9/2010	3:41:50 PM	SiCl4 pre valve closed
6/9/2010	3:41:50 PM	SiCl4 post valve closed
6/9/2010	3:41:50 PM	Bubbler valve closed
6/9/2010	3:41:50 PM	Main Vac valve opened
6/9/2010	3:41:50 PM	Bypass valve opened
6/9/2010	3:41:50 PM	Helium MFC set to  0.000000
6/9/2010	3:41:50 PM	H2 MFC set to  0.000000
6/9/2010	3:41:50 PM	BCl3 MFC set to  0.000000
6/9/2010	3:41:50 PM	PHl3 MFC set to  0.000000
6/9/2010	3:41:50 PM	SiCl4 MFC set to  0.000000
6/9/2010	3:41:50 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	3:41:50 PM	Tube furnace set to 0
6/9/2010	3:41:51 PM	Run finished at 3:41 PM
6/9/2010	4:28:48 PM	Main Vac valve closed
6/9/2010	4:28:50 PM	Bypass valve closed
6/9/2010	4:29:43 PM	Main Vac valve opened
6/9/2010	4:29:44 PM	Bypass valve opened
6/9/2010	4:43:11 PM	Recipe started at 4:43 PM
6/9/2010	4:43:11 PM	Helium valve closed
6/9/2010	4:43:11 PM	BCl3 valve closed
6/9/2010	4:43:11 PM	PH3 valve closed
6/9/2010	4:43:11 PM	SiCl4 pre valve closed
6/9/2010	4:43:11 PM	SiCl4 post valve closed
6/9/2010	4:43:11 PM	Main Vac valve closed
6/9/2010	4:43:11 PM	Bypass valve closed
6/9/2010	4:43:11 PM	Bubbler valve closed
6/9/2010	4:43:11 PM	H2 valve opened
6/9/2010	4:43:11 PM	Helium MFC set to  0.000000
6/9/2010	4:43:11 PM	H2 MFC set to  500.000000
6/9/2010	4:43:11 PM	BCl3 MFC set to  0.000000
6/9/2010	4:43:11 PM	PHl3 MFC set to  0.000000
6/9/2010	4:43:11 PM	SiCl4 MFC set to  0.000000
6/9/2010	4:43:11 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	4:43:11 PM	Tube furnace set to 0
6/9/2010	4:43:31 PM	Run aborted at 4:43 PM
6/9/2010	4:43:31 PM	Helium valve closed
6/9/2010	4:43:31 PM	H2 valve closed
6/9/2010	4:43:31 PM	BCl3 valve closed
6/9/2010	4:43:31 PM	PH3 valve closed
6/9/2010	4:43:31 PM	SiCl4 pre valve closed
6/9/2010	4:43:31 PM	SiCl4 post valve closed
6/9/2010	4:43:31 PM	Bypass valve closed
6/9/2010	4:43:31 PM	Main Vac valve closed
6/9/2010	4:43:31 PM	Bubbler valve closed
6/9/2010	4:43:31 PM	Helium MFC set to  0.000000
6/9/2010	4:43:31 PM	H2 MFC set to  0.000000
6/9/2010	4:43:31 PM	BCl3 MFC set to  0.000000
6/9/2010	4:43:31 PM	PHl3 MFC set to  0.000000
6/9/2010	4:43:31 PM	SiCl4 MFC set to  0.000000
6/9/2010	4:43:31 PM	Tube furnace set to 0
6/9/2010	4:44:15 PM	Recipe started at 4:44 PM
6/9/2010	4:44:15 PM	Helium valve closed
6/9/2010	4:44:15 PM	BCl3 valve closed
6/9/2010	4:44:15 PM	PH3 valve closed
6/9/2010	4:44:15 PM	SiCl4 pre valve closed
6/9/2010	4:44:15 PM	SiCl4 post valve closed
6/9/2010	4:44:15 PM	Main Vac valve closed
6/9/2010	4:44:15 PM	Bypass valve closed
6/9/2010	4:44:15 PM	Bubbler valve closed
6/9/2010	4:44:15 PM	H2 valve opened
6/9/2010	4:44:15 PM	Helium MFC set to  0.000000
6/9/2010	4:44:15 PM	H2 MFC set to  500.000000
6/9/2010	4:44:15 PM	BCl3 MFC set to  0.000000
6/9/2010	4:44:15 PM	PHl3 MFC set to  0.000000
6/9/2010	4:44:15 PM	SiCl4 MFC set to  0.000000
6/9/2010	4:44:15 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	4:44:15 PM	Tube furnace set to 0
6/9/2010	4:45:16 PM	Helium valve closed
6/9/2010	4:45:16 PM	BCl3 valve closed
6/9/2010	4:45:16 PM	PH3 valve closed
6/9/2010	4:45:16 PM	SiCl4 pre valve closed
6/9/2010	4:45:16 PM	SiCl4 post valve closed
6/9/2010	4:45:16 PM	Main Vac valve closed
6/9/2010	4:45:16 PM	Bypass valve closed
6/9/2010	4:45:16 PM	H2 valve opened
6/9/2010	4:45:16 PM	Bubbler valve opened
6/9/2010	4:45:16 PM	Helium MFC set to  0.000000
6/9/2010	4:45:16 PM	H2 MFC set to  500.000000
6/9/2010	4:45:16 PM	BCl3 MFC set to  0.000000
6/9/2010	4:45:16 PM	PHl3 MFC set to  0.000000
6/9/2010	4:45:16 PM	SiCl4 MFC set to  0.000000
6/9/2010	4:45:16 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	4:45:16 PM	Tube furnace set to 1000
6/9/2010	5:05:16 PM	Helium valve closed
6/9/2010	5:05:16 PM	PH3 valve closed
6/9/2010	5:05:16 PM	Main Vac valve closed
6/9/2010	5:05:16 PM	Bypass valve closed
6/9/2010	5:05:16 PM	H2 valve opened
6/9/2010	5:05:16 PM	BCl3 valve opened
6/9/2010	5:05:16 PM	SiCl4 pre valve opened
6/9/2010	5:05:16 PM	SiCl4 post valve opened
6/9/2010	5:05:16 PM	Bubbler valve opened
6/9/2010	5:05:16 PM	Helium MFC set to  0.000000
6/9/2010	5:05:16 PM	H2 MFC set to  500.000000
6/9/2010	5:05:16 PM	BCl3 MFC set to  35.000000
6/9/2010	5:05:16 PM	PHl3 MFC set to  0.000000
6/9/2010	5:05:16 PM	SiCl4 MFC set to  50.000000
6/9/2010	5:05:16 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:05:16 PM	Tube furnace set to 1000
6/9/2010	5:13:16 PM	H2 valve closed
6/9/2010	5:13:16 PM	BCl3 valve closed
6/9/2010	5:13:16 PM	PH3 valve closed
6/9/2010	5:13:16 PM	SiCl4 pre valve closed
6/9/2010	5:13:16 PM	SiCl4 post valve closed
6/9/2010	5:13:16 PM	Main Vac valve closed
6/9/2010	5:13:16 PM	Bypass valve closed
6/9/2010	5:13:16 PM	Helium valve opened
6/9/2010	5:13:16 PM	Bubbler valve opened
6/9/2010	5:13:16 PM	Helium MFC set to  500.000000
6/9/2010	5:13:16 PM	H2 MFC set to  0.000000
6/9/2010	5:13:16 PM	BCl3 MFC set to  0.000000
6/9/2010	5:13:16 PM	PHl3 MFC set to  0.000000
6/9/2010	5:13:16 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:13:16 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:13:16 PM	Tube furnace set to 0
6/9/2010	5:33:16 PM	Helium valve closed
6/9/2010	5:33:16 PM	H2 valve closed
6/9/2010	5:33:16 PM	BCl3 valve closed
6/9/2010	5:33:16 PM	PH3 valve closed
6/9/2010	5:33:16 PM	SiCl4 pre valve closed
6/9/2010	5:33:16 PM	SiCl4 post valve closed
6/9/2010	5:33:16 PM	Main Vac valve closed
6/9/2010	5:33:16 PM	Bypass valve closed
6/9/2010	5:33:16 PM	Bubbler valve closed
6/9/2010	5:33:16 PM	Helium MFC set to  0.000000
6/9/2010	5:33:16 PM	H2 MFC set to  0.000000
6/9/2010	5:33:16 PM	BCl3 MFC set to  0.000000
6/9/2010	5:33:16 PM	PHl3 MFC set to  0.000000
6/9/2010	5:33:16 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:33:16 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:33:16 PM	Tube furnace set to 0
6/9/2010	5:33:16 PM	Run finished at 5:33 PM
6/9/2010	5:37:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	5:37:48 PM	Recipe started at 5:37 PM
6/9/2010	5:37:48 PM	Helium valve closed
6/9/2010	5:37:48 PM	H2 valve closed
6/9/2010	5:37:48 PM	BCl3 valve closed
6/9/2010	5:37:48 PM	PH3 valve closed
6/9/2010	5:37:48 PM	SiCl4 pre valve closed
6/9/2010	5:37:48 PM	SiCl4 post valve closed
6/9/2010	5:37:48 PM	Main Vac valve closed
6/9/2010	5:37:48 PM	Bubbler valve closed
6/9/2010	5:37:48 PM	Bypass valve opened
6/9/2010	5:37:48 PM	Helium MFC set to  0.000000
6/9/2010	5:37:48 PM	H2 MFC set to  0.000000
6/9/2010	5:37:48 PM	BCl3 MFC set to  0.000000
6/9/2010	5:37:48 PM	PHl3 MFC set to  0.000000
6/9/2010	5:37:48 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:37:48 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:37:48 PM	Tube furnace set to 0
6/9/2010	5:38:35 PM	Helium valve closed
6/9/2010	5:38:35 PM	H2 valve closed
6/9/2010	5:38:35 PM	BCl3 valve closed
6/9/2010	5:38:35 PM	PH3 valve closed
6/9/2010	5:38:35 PM	SiCl4 pre valve closed
6/9/2010	5:38:35 PM	SiCl4 post valve closed
6/9/2010	5:38:35 PM	Bubbler valve closed
6/9/2010	5:38:35 PM	Main Vac valve opened
6/9/2010	5:38:35 PM	Bypass valve opened
6/9/2010	5:38:35 PM	Helium MFC set to  0.000000
6/9/2010	5:38:35 PM	H2 MFC set to  0.000000
6/9/2010	5:38:35 PM	BCl3 MFC set to  0.000000
6/9/2010	5:38:35 PM	PHl3 MFC set to  0.000000
6/9/2010	5:38:35 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:38:35 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:38:35 PM	Tube furnace set to 0
6/9/2010	5:38:35 PM	Run finished at 5:38 PM
6/9/2010	5:38:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	5:39:09 PM	Recipe started at 5:39 PM
6/9/2010	5:39:09 PM	H2 valve closed
6/9/2010	5:39:09 PM	BCl3 valve closed
6/9/2010	5:39:09 PM	PH3 valve closed
6/9/2010	5:39:09 PM	SiCl4 pre valve closed
6/9/2010	5:39:09 PM	SiCl4 post valve closed
6/9/2010	5:39:09 PM	Main Vac valve closed
6/9/2010	5:39:09 PM	Bypass valve closed
6/9/2010	5:39:09 PM	Bubbler valve closed
6/9/2010	5:39:09 PM	Helium valve opened
6/9/2010	5:39:09 PM	Helium MFC set to  500.000000
6/9/2010	5:39:09 PM	H2 MFC set to  0.000000
6/9/2010	5:39:09 PM	BCl3 MFC set to  0.000000
6/9/2010	5:39:09 PM	PHl3 MFC set to  0.000000
6/9/2010	5:39:09 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:39:09 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:39:09 PM	Tube furnace set to 80
6/9/2010	5:39:50 PM	Helium valve closed
6/9/2010	5:39:50 PM	H2 valve closed
6/9/2010	5:39:50 PM	BCl3 valve closed
6/9/2010	5:39:50 PM	PH3 valve closed
6/9/2010	5:39:50 PM	SiCl4 pre valve closed
6/9/2010	5:39:50 PM	SiCl4 post valve closed
6/9/2010	5:39:50 PM	Main Vac valve closed
6/9/2010	5:39:50 PM	Bypass valve closed
6/9/2010	5:39:50 PM	Bubbler valve closed
6/9/2010	5:39:50 PM	Helium MFC set to  0.000000
6/9/2010	5:39:50 PM	H2 MFC set to  0.000000
6/9/2010	5:39:50 PM	BCl3 MFC set to  0.000000
6/9/2010	5:39:50 PM	PHl3 MFC set to  0.000000
6/9/2010	5:39:50 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:39:50 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:39:51 PM	Tube furnace set to 80
6/9/2010	5:40:06 PM	Helium valve closed
6/9/2010	5:40:06 PM	H2 valve closed
6/9/2010	5:40:06 PM	BCl3 valve closed
6/9/2010	5:40:06 PM	PH3 valve closed
6/9/2010	5:40:06 PM	SiCl4 pre valve closed
6/9/2010	5:40:06 PM	SiCl4 post valve closed
6/9/2010	5:40:06 PM	Main Vac valve closed
6/9/2010	5:40:06 PM	Bubbler valve closed
6/9/2010	5:40:06 PM	Bypass valve opened
6/9/2010	5:40:06 PM	Helium MFC set to  0.000000
6/9/2010	5:40:06 PM	H2 MFC set to  0.000000
6/9/2010	5:40:06 PM	BCl3 MFC set to  0.000000
6/9/2010	5:40:06 PM	PHl3 MFC set to  0.000000
6/9/2010	5:40:06 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:40:06 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:40:06 PM	Tube furnace set to 80
6/9/2010	5:40:33 PM	Helium valve closed
6/9/2010	5:40:33 PM	H2 valve closed
6/9/2010	5:40:33 PM	BCl3 valve closed
6/9/2010	5:40:33 PM	PH3 valve closed
6/9/2010	5:40:33 PM	SiCl4 pre valve closed
6/9/2010	5:40:33 PM	SiCl4 post valve closed
6/9/2010	5:40:33 PM	Bubbler valve closed
6/9/2010	5:40:33 PM	Main Vac valve opened
6/9/2010	5:40:33 PM	Bypass valve opened
6/9/2010	5:40:33 PM	Helium MFC set to  0.000000
6/9/2010	5:40:33 PM	H2 MFC set to  0.000000
6/9/2010	5:40:33 PM	BCl3 MFC set to  0.000000
6/9/2010	5:40:33 PM	PHl3 MFC set to  0.000000
6/9/2010	5:40:33 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:40:33 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:40:33 PM	Tube furnace set to 80
6/9/2010	5:43:33 PM	H2 valve closed
6/9/2010	5:43:33 PM	BCl3 valve closed
6/9/2010	5:43:33 PM	PH3 valve closed
6/9/2010	5:43:33 PM	SiCl4 pre valve closed
6/9/2010	5:43:33 PM	SiCl4 post valve closed
6/9/2010	5:43:33 PM	Main Vac valve closed
6/9/2010	5:43:33 PM	Bypass valve closed
6/9/2010	5:43:33 PM	Bubbler valve closed
6/9/2010	5:43:33 PM	Helium valve opened
6/9/2010	5:43:33 PM	Helium MFC set to  500.000000
6/9/2010	5:43:33 PM	H2 MFC set to  0.000000
6/9/2010	5:43:33 PM	BCl3 MFC set to  0.000000
6/9/2010	5:43:33 PM	PHl3 MFC set to  0.000000
6/9/2010	5:43:33 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:43:33 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:43:34 PM	Tube furnace set to 80
6/9/2010	5:44:14 PM	Helium valve closed
6/9/2010	5:44:14 PM	H2 valve closed
6/9/2010	5:44:14 PM	BCl3 valve closed
6/9/2010	5:44:14 PM	PH3 valve closed
6/9/2010	5:44:14 PM	SiCl4 pre valve closed
6/9/2010	5:44:14 PM	SiCl4 post valve closed
6/9/2010	5:44:14 PM	Main Vac valve closed
6/9/2010	5:44:14 PM	Bypass valve closed
6/9/2010	5:44:14 PM	Bubbler valve closed
6/9/2010	5:44:14 PM	Helium MFC set to  0.000000
6/9/2010	5:44:14 PM	H2 MFC set to  0.000000
6/9/2010	5:44:14 PM	BCl3 MFC set to  0.000000
6/9/2010	5:44:14 PM	PHl3 MFC set to  0.000000
6/9/2010	5:44:14 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:44:14 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:44:15 PM	Tube furnace set to 80
6/9/2010	5:44:30 PM	Helium valve closed
6/9/2010	5:44:30 PM	H2 valve closed
6/9/2010	5:44:30 PM	BCl3 valve closed
6/9/2010	5:44:30 PM	PH3 valve closed
6/9/2010	5:44:30 PM	SiCl4 pre valve closed
6/9/2010	5:44:30 PM	SiCl4 post valve closed
6/9/2010	5:44:30 PM	Main Vac valve closed
6/9/2010	5:44:30 PM	Bubbler valve closed
6/9/2010	5:44:30 PM	Bypass valve opened
6/9/2010	5:44:30 PM	Helium MFC set to  0.000000
6/9/2010	5:44:30 PM	H2 MFC set to  0.000000
6/9/2010	5:44:30 PM	BCl3 MFC set to  0.000000
6/9/2010	5:44:30 PM	PHl3 MFC set to  0.000000
6/9/2010	5:44:30 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:44:30 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:44:30 PM	Tube furnace set to 80
6/9/2010	5:44:57 PM	Helium valve closed
6/9/2010	5:44:57 PM	H2 valve closed
6/9/2010	5:44:57 PM	BCl3 valve closed
6/9/2010	5:44:57 PM	PH3 valve closed
6/9/2010	5:44:57 PM	SiCl4 pre valve closed
6/9/2010	5:44:57 PM	SiCl4 post valve closed
6/9/2010	5:44:57 PM	Bubbler valve closed
6/9/2010	5:44:57 PM	Main Vac valve opened
6/9/2010	5:44:57 PM	Bypass valve opened
6/9/2010	5:44:57 PM	Helium MFC set to  0.000000
6/9/2010	5:44:57 PM	H2 MFC set to  0.000000
6/9/2010	5:44:57 PM	BCl3 MFC set to  0.000000
6/9/2010	5:44:57 PM	PHl3 MFC set to  0.000000
6/9/2010	5:44:57 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:44:57 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:44:57 PM	Tube furnace set to 80
6/9/2010	5:47:57 PM	H2 valve closed
6/9/2010	5:47:57 PM	BCl3 valve closed
6/9/2010	5:47:57 PM	PH3 valve closed
6/9/2010	5:47:57 PM	SiCl4 pre valve closed
6/9/2010	5:47:57 PM	SiCl4 post valve closed
6/9/2010	5:47:57 PM	Main Vac valve closed
6/9/2010	5:47:57 PM	Bypass valve closed
6/9/2010	5:47:57 PM	Bubbler valve closed
6/9/2010	5:47:57 PM	Helium valve opened
6/9/2010	5:47:57 PM	Helium MFC set to  500.000000
6/9/2010	5:47:57 PM	H2 MFC set to  0.000000
6/9/2010	5:47:57 PM	BCl3 MFC set to  0.000000
6/9/2010	5:47:57 PM	PHl3 MFC set to  0.000000
6/9/2010	5:47:57 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:47:57 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:47:57 PM	Tube furnace set to 80
6/9/2010	5:48:38 PM	Helium valve closed
6/9/2010	5:48:38 PM	H2 valve closed
6/9/2010	5:48:38 PM	BCl3 valve closed
6/9/2010	5:48:38 PM	PH3 valve closed
6/9/2010	5:48:38 PM	SiCl4 pre valve closed
6/9/2010	5:48:38 PM	SiCl4 post valve closed
6/9/2010	5:48:38 PM	Main Vac valve closed
6/9/2010	5:48:38 PM	Bypass valve closed
6/9/2010	5:48:38 PM	Bubbler valve closed
6/9/2010	5:48:38 PM	Helium MFC set to  0.000000
6/9/2010	5:48:38 PM	H2 MFC set to  0.000000
6/9/2010	5:48:38 PM	BCl3 MFC set to  0.000000
6/9/2010	5:48:38 PM	PHl3 MFC set to  0.000000
6/9/2010	5:48:38 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:48:38 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:48:38 PM	Tube furnace set to 80
6/9/2010	5:48:53 PM	Helium valve closed
6/9/2010	5:48:53 PM	H2 valve closed
6/9/2010	5:48:53 PM	BCl3 valve closed
6/9/2010	5:48:53 PM	PH3 valve closed
6/9/2010	5:48:53 PM	SiCl4 pre valve closed
6/9/2010	5:48:53 PM	SiCl4 post valve closed
6/9/2010	5:48:53 PM	Main Vac valve closed
6/9/2010	5:48:53 PM	Bubbler valve closed
6/9/2010	5:48:53 PM	Bypass valve opened
6/9/2010	5:48:53 PM	Helium MFC set to  0.000000
6/9/2010	5:48:53 PM	H2 MFC set to  0.000000
6/9/2010	5:48:53 PM	BCl3 MFC set to  0.000000
6/9/2010	5:48:53 PM	PHl3 MFC set to  0.000000
6/9/2010	5:48:53 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:48:53 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:48:53 PM	Tube furnace set to 80
6/9/2010	5:49:20 PM	Helium valve closed
6/9/2010	5:49:20 PM	H2 valve closed
6/9/2010	5:49:20 PM	BCl3 valve closed
6/9/2010	5:49:20 PM	PH3 valve closed
6/9/2010	5:49:20 PM	SiCl4 pre valve closed
6/9/2010	5:49:20 PM	SiCl4 post valve closed
6/9/2010	5:49:20 PM	Bubbler valve closed
6/9/2010	5:49:20 PM	Main Vac valve opened
6/9/2010	5:49:20 PM	Bypass valve opened
6/9/2010	5:49:20 PM	Helium MFC set to  0.000000
6/9/2010	5:49:20 PM	H2 MFC set to  0.000000
6/9/2010	5:49:20 PM	BCl3 MFC set to  0.000000
6/9/2010	5:49:20 PM	PHl3 MFC set to  0.000000
6/9/2010	5:49:20 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:49:20 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:49:20 PM	Tube furnace set to 80
6/9/2010	5:52:20 PM	Helium valve closed
6/9/2010	5:52:20 PM	H2 valve closed
6/9/2010	5:52:20 PM	BCl3 valve closed
6/9/2010	5:52:20 PM	PH3 valve closed
6/9/2010	5:52:20 PM	SiCl4 pre valve closed
6/9/2010	5:52:20 PM	SiCl4 post valve closed
6/9/2010	5:52:20 PM	Bubbler valve closed
6/9/2010	5:52:20 PM	Main Vac valve opened
6/9/2010	5:52:20 PM	Bypass valve opened
6/9/2010	5:52:20 PM	Helium MFC set to  0.000000
6/9/2010	5:52:20 PM	H2 MFC set to  0.000000
6/9/2010	5:52:20 PM	BCl3 MFC set to  0.000000
6/9/2010	5:52:20 PM	PHl3 MFC set to  0.000000
6/9/2010	5:52:20 PM	SiCl4 MFC set to  0.000000
6/9/2010	5:52:20 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	5:52:20 PM	Tube furnace set to 0
6/9/2010	5:52:21 PM	Run finished at 5:52 PM
6/9/2010	7:56:46 PM	Main Vac valve closed
6/9/2010	7:56:48 PM	Bypass valve closed
6/9/2010	7:57:41 PM	Main Vac valve opened
6/9/2010	7:57:42 PM	Bypass valve opened
6/9/2010	7:57:58 PM	Recipe started at 7:57 PM
6/9/2010	7:57:58 PM	Helium valve closed
6/9/2010	7:57:58 PM	BCl3 valve closed
6/9/2010	7:57:58 PM	PH3 valve closed
6/9/2010	7:57:58 PM	SiCl4 pre valve closed
6/9/2010	7:57:58 PM	SiCl4 post valve closed
6/9/2010	7:57:58 PM	Main Vac valve closed
6/9/2010	7:57:58 PM	Bypass valve closed
6/9/2010	7:57:58 PM	Bubbler valve closed
6/9/2010	7:57:58 PM	H2 valve opened
6/9/2010	7:57:58 PM	Helium MFC set to  0.000000
6/9/2010	7:57:58 PM	H2 MFC set to  500.000000
6/9/2010	7:57:58 PM	BCl3 MFC set to  0.000000
6/9/2010	7:57:58 PM	PHl3 MFC set to  0.000000
6/9/2010	7:57:58 PM	SiCl4 MFC set to  0.000000
6/9/2010	7:57:58 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	7:57:58 PM	Tube furnace set to 0
6/9/2010	7:59:18 PM	Helium valve closed
6/9/2010	7:59:18 PM	BCl3 valve closed
6/9/2010	7:59:18 PM	PH3 valve closed
6/9/2010	7:59:18 PM	SiCl4 pre valve closed
6/9/2010	7:59:18 PM	SiCl4 post valve closed
6/9/2010	7:59:18 PM	Main Vac valve closed
6/9/2010	7:59:18 PM	Bypass valve closed
6/9/2010	7:59:18 PM	H2 valve opened
6/9/2010	7:59:18 PM	Bubbler valve opened
6/9/2010	7:59:18 PM	Helium MFC set to  0.000000
6/9/2010	7:59:18 PM	H2 MFC set to  500.000000
6/9/2010	7:59:18 PM	BCl3 MFC set to  0.000000
6/9/2010	7:59:18 PM	PHl3 MFC set to  0.000000
6/9/2010	7:59:18 PM	SiCl4 MFC set to  0.000000
6/9/2010	7:59:18 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	7:59:19 PM	Tube furnace set to 1000
6/9/2010	8:19:19 PM	Helium valve closed
6/9/2010	8:19:19 PM	PH3 valve closed
6/9/2010	8:19:19 PM	Main Vac valve closed
6/9/2010	8:19:19 PM	Bypass valve closed
6/9/2010	8:19:19 PM	H2 valve opened
6/9/2010	8:19:19 PM	BCl3 valve opened
6/9/2010	8:19:19 PM	SiCl4 pre valve opened
6/9/2010	8:19:19 PM	SiCl4 post valve opened
6/9/2010	8:19:19 PM	Bubbler valve opened
6/9/2010	8:19:19 PM	Helium MFC set to  0.000000
6/9/2010	8:19:19 PM	H2 MFC set to  500.000000
6/9/2010	8:19:19 PM	BCl3 MFC set to  35.000000
6/9/2010	8:19:19 PM	PHl3 MFC set to  0.000000
6/9/2010	8:19:19 PM	SiCl4 MFC set to  50.000000
6/9/2010	8:19:19 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	8:19:19 PM	Tube furnace set to 1000
6/9/2010	8:29:19 PM	H2 valve closed
6/9/2010	8:29:19 PM	BCl3 valve closed
6/9/2010	8:29:19 PM	PH3 valve closed
6/9/2010	8:29:19 PM	SiCl4 pre valve closed
6/9/2010	8:29:19 PM	SiCl4 post valve closed
6/9/2010	8:29:19 PM	Main Vac valve closed
6/9/2010	8:29:19 PM	Bypass valve closed
6/9/2010	8:29:19 PM	Helium valve opened
6/9/2010	8:29:19 PM	Bubbler valve opened
6/9/2010	8:29:19 PM	Helium MFC set to  500.000000
6/9/2010	8:29:19 PM	H2 MFC set to  0.000000
6/9/2010	8:29:19 PM	BCl3 MFC set to  0.000000
6/9/2010	8:29:19 PM	PHl3 MFC set to  0.000000
6/9/2010	8:29:19 PM	SiCl4 MFC set to  0.000000
6/9/2010	8:29:19 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	8:29:19 PM	Tube furnace set to 0
6/9/2010	8:49:19 PM	Helium valve closed
6/9/2010	8:49:19 PM	H2 valve closed
6/9/2010	8:49:19 PM	BCl3 valve closed
6/9/2010	8:49:19 PM	PH3 valve closed
6/9/2010	8:49:19 PM	SiCl4 pre valve closed
6/9/2010	8:49:19 PM	SiCl4 post valve closed
6/9/2010	8:49:19 PM	Main Vac valve closed
6/9/2010	8:49:19 PM	Bypass valve closed
6/9/2010	8:49:19 PM	Bubbler valve closed
6/9/2010	8:49:19 PM	Helium MFC set to  0.000000
6/9/2010	8:49:19 PM	H2 MFC set to  0.000000
6/9/2010	8:49:19 PM	BCl3 MFC set to  0.000000
6/9/2010	8:49:19 PM	PHl3 MFC set to  0.000000
6/9/2010	8:49:19 PM	SiCl4 MFC set to  0.000000
6/9/2010	8:49:19 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	8:49:19 PM	Tube furnace set to 0
6/9/2010	8:49:19 PM	Run finished at 8:49 PM
6/9/2010	8:52:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/9/2010	8:52:10 PM	Recipe started at 8:52 PM
6/9/2010	8:52:10 PM	Helium valve closed
6/9/2010	8:52:10 PM	H2 valve closed
6/9/2010	8:52:10 PM	BCl3 valve closed
6/9/2010	8:52:10 PM	PH3 valve closed
6/9/2010	8:52:10 PM	SiCl4 pre valve closed
6/9/2010	8:52:10 PM	SiCl4 post valve closed
6/9/2010	8:52:10 PM	Main Vac valve closed
6/9/2010	8:52:10 PM	Bubbler valve closed
6/9/2010	8:52:10 PM	Bypass valve opened
6/9/2010	8:52:10 PM	Helium MFC set to  0.000000
6/9/2010	8:52:10 PM	H2 MFC set to  0.000000
6/9/2010	8:52:10 PM	BCl3 MFC set to  0.000000
6/9/2010	8:52:10 PM	PHl3 MFC set to  0.000000
6/9/2010	8:52:10 PM	SiCl4 MFC set to  0.000000
6/9/2010	8:52:10 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	8:52:10 PM	Tube furnace set to 0
6/9/2010	8:52:55 PM	Helium valve closed
6/9/2010	8:52:55 PM	H2 valve closed
6/9/2010	8:52:55 PM	BCl3 valve closed
6/9/2010	8:52:55 PM	PH3 valve closed
6/9/2010	8:52:55 PM	SiCl4 pre valve closed
6/9/2010	8:52:55 PM	SiCl4 post valve closed
6/9/2010	8:52:55 PM	Bubbler valve closed
6/9/2010	8:52:55 PM	Main Vac valve opened
6/9/2010	8:52:55 PM	Bypass valve opened
6/9/2010	8:52:55 PM	Helium MFC set to  0.000000
6/9/2010	8:52:55 PM	H2 MFC set to  0.000000
6/9/2010	8:52:55 PM	BCl3 MFC set to  0.000000
6/9/2010	8:52:55 PM	PHl3 MFC set to  0.000000
6/9/2010	8:52:55 PM	SiCl4 MFC set to  0.000000
6/9/2010	8:52:55 PM	Bypass solenoid MFC set to  0.000000
6/9/2010	8:52:55 PM	Tube furnace set to 0
6/9/2010	8:52:56 PM	Run finished at 8:52 PM
6/9/2010	8:52:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
